Abstract: Disclosed is a method of forming a thin film using a chemical purge material, the method comprising supplying a metal precursor to the inside of a chamber oh which a substrate is placed; purging the interior of the chamber; supplying a reactant to the inside of the chamber so that the reactant reacts with the metal precursor to form the thin film; and supplying a chemical purge material to the inside of the chamber so that a portion of the reactant is removed.

Abstract: Disclosed is a high voltage output device having a serial-parallel stack structure of capacitors. The high voltage output device includes a substrate includes a capacitor element and a pillar structure provided on an upper surface of the substrate. The substrate includes a first electrode and a second electrode, which have different potentials from each other. The capacitor element is connected to at least one of the first electrode and the second electrode.

Abstract: Disclosed is a method for forming a conversion coating on the outer surface of magnesium or a magnesium alloy by surface treatment with acidic and alkaline solutions. The method is carried out in an environmentally friendly manner to improve the corrosion resistance of the magnesium or magnesium alloy. The method minimizes the damage to the appearance of the magnesium or magnesium even after surface treatment and maximizes the attractive appearance of the magnesium or magnesium alloy.

Abstract: Disclosed herein is a method for the surface treatment of magnesium or a magnesium alloy by anodization to form an anodized oxide coating on the magnesium or magnesium alloy. The method comprises: removing impurities and an oxide layer present on the surface of magnesium or a magnesium alloy using a strongly alkaline aqueous solution (pretreatment); and immersing the pretreated magnesium or magnesium alloy in an alkaline electrolyte and applying a direct current having a current density of 3 A/dm2 or less to the electrolyte to form a magnesium oxide coating (microarc plasma anodization).