Patents by Inventor Kyu-Hynn Lee

Kyu-Hynn Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods of forming self-aligned contact pads using a damascene gate process
    Patent number: 6613621
    Abstract: Self-aligned contacts in integrated circuits can be formed on an integrated circuit substrate having an active region. A groove can be formed in the insulating layer and a conductive material can be formed in the groove to a level that is recessed in the groove. An insulating material can be formed in the groove on the conductive material that has an etch selectivity with respect to the insulating layer. A contact that is self-aligned to the active region can be then be formed.
    Type: Grant
    Filed: March 9, 2001
    Date of Patent: September 2, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyung-Soo Uh, Kyu-Hynn Lee, Tae-Young Chung, Ki-Nam Kim, Yoo-Sang Hwang