Patents by Inventor Kyu jung CHO

Kyu jung CHO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 11551913
    Abstract: The present inventive concept relates to a substrate treatment apparatus comprising: a support part for supporting a substrate; a first electrode part disposed above the support part; a second electrode part disposed above the first electrode part; a generation hole formed to extend through the first electrode part; and a protruding electrode coupled to the second electrode part while protruding downward from the second electrode part at a position corresponding to the generation hole, wherein the protruding electrode is formed to have a shorter length than the first electrode part in the vertical direction.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: January 10, 2023
    Inventors: Woong Kyo Oh, Hyun Ho Koo, Kwang Su Yoo, Sang Du Lee, Kyu jung Cho
  • SUBSTRATE TREATMENT APPARATUS
    Publication number: 20200357613
    Abstract: The present inventive concept relates to a substrate treatment apparatus comprising: a support part for supporting a substrate; a first electrode part disposed above the support part; a second electrode part disposed above the first electrode part; a generation hole formed to extend through the first electrode part; and a protruding electrode coupled to the second electrode part while protruding downward from the second electrode part at a position corresponding to the generation hole, wherein the protruding electrode is formed to have a shorter length than the first electrode part in the vertical direction.
    Type: Application
    Filed: January 29, 2019
    Publication date: November 12, 2020
    Inventors: WOONG KYO OH, Hyun Ho KOO, Kwang Su YOO, Sang Du LEE, Kyu jung CHO