Patents by Inventor Kyu Kab RHE

Kyu Kab RHE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection method and apparatus, and lithographic apparatus
    Patent number: 9927717
    Abstract: A method of correcting an image characteristic of a substrate onto which one or more product features have been formed using a lithographic process, and an associated inspection apparatus method. The method includes measuring an error in the image characteristic of the substrate, and determining a correction for a subsequent formation of the product features based upon the measured error and a characteristic of one or more of the product feature(s).
    Type: Grant
    Filed: November 7, 2014
    Date of Patent: March 27, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Kyu Kab Rhe, David Deckers, Hubertus Johannes Gertrudus Simons, Thomas Theeuwes
  • INSPECTION METHOD AND APPARATUS, AND LITHOGRAPHIC APPARATUS
    Publication number: 20160327870
    Abstract: A method of correcting an image characteristic of a substrate onto which one or more product features have been formed using a lithographic process, and an associated inspection apparatus method. The method includes measuring an error in the image characteristic of the substrate, and determining a correction for a subsequent formation of the product features based upon the measured error and a characteristic of one or more of the product feature(s).
    Type: Application
    Filed: November 7, 2014
    Publication date: November 10, 2016
    Inventors: Kyu Kab RHE, David DECKERS, Hubertus Johannes Gertrudus SIMONS, Thomas THEEUWES