Abstract: An apparatus for manufacturing a semiconductor device includes a substrate transfer unit configured to transfer a substrate, a rail unit including a driving rail extending in a first direction that the substrate transfer unit moves and a stopper on a side of the driving rail in a second direction crossing the first direction, and a lifting unit configured to move in the first direction and a third direction perpendicular to the first and second directions to remove the substrate transfer unit from the rail unit, wherein the lifting unit is configured to contact the stopper to move the stopper from a closed state to an open state.

Abstract: A lighting apparatus may include a housing and an illuminating member. The housing may include sequentially stacked shades. Each of the shades may have a central portion and an edge portion extending from the central portion. The central portions of the shades may be stacked. The edge portions of the shades may have an annular shape. The edge portions of the shades may be arranged spaced apart from each other. The shades may include a material having a high thermal conductivity. The shades may include aluminum, copper, an alloy thereof, etc. The edge portions of the shades may function as heat dissipating fins for dissipating a heat in the illuminating member. The illuminating member may be installed at the housing.