Patents by Inventor Kyu Tae CHO

Kyu Tae CHO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF ASSEMBLING SUBSTRATE SUPPORTING APPARATUS
    Publication number: 20240261882
    Abstract: Disclosed herein is a method of assembling a substrate supporting apparatus, including coupling a conductive rod to an electrode installed in a substrate support provided to support a substrate, forming a sacrificial layer on the rod, bonding the rod and the electrode by melting and infiltrating a filler into a coupling area between the rod and the electrode, while forming a protective layer between the rod and the sacrificial layer by infiltrating the filler into a gap between the rod and the sacrificial layer, and coupling a shaft to the substrate support, the rod extending through the shaft.
    Type: Application
    Filed: October 12, 2023
    Publication date: August 8, 2024
    Applicant: WONIK IPS CO., LTD.
    Inventor: Kyu Tae CHO
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20190035666
    Abstract: The present invention provides a substrate processing apparatus for controlling a plasma environment on a substrate.
    Type: Application
    Filed: July 25, 2018
    Publication date: January 31, 2019
    Inventors: Sung Soon LIM, Yong Baek JEON, Doo Ho YANG, Kyu Tae CHO, Jae Hoon CHO, Ji Su KIM