Patents by Inventor Kyun Sa Rha

Kyun Sa Rha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming metal line in semiconductor device
    Patent number: 6284634
    Abstract: Method for forming a metal line in a semiconductor device, which can effectively suppress abnormal oxidation in formation of metal line of tungsten or tungsten silicide, including the steps of (1) forming an insulating material layer on a semiconductor substrate, and forming a conduction line on the insulating material layer, (2) nitriding an exposed surface of the conduction line, and (3) oxidizing the semiconductor substrate including the conduction line having a nitride layer formed on the exposed surface thereof.
    Type: Grant
    Filed: June 1, 1999
    Date of Patent: September 4, 2001
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventor: Kyun Sa Rha