Patents by Inventor Kyung-Bum Koo

Kyung-Bum Koo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing metal pattern of semiconductor device
    Publication number: 20020001945
    Abstract: A method of manufacturing a metal pattern of a semiconductor device. A Ti layer and a metal layer are successively formed on a semiconductor substrate or on an insulating layer. Then, a wiring pattern including a Ti layer pattern and a metal layer pattern is formed by patterning said Ti layer and the metal layer. Heat treating is employed under an atmosphere of a compound including nitrogen in order to react an exposed portion of the Ti layer pattern to form TiN as a main product, thereby increasing the stability and adhesiveness of the metal layer for subsequent processes.
    Type: Application
    Filed: February 28, 2001
    Publication date: January 3, 2002
    Inventors: Won-Sang Song, In-Sun Park, Kyung-Bum Koo, Young-Cheon Kim