Abstract: Provided are a method of depositing a thin film and a method of manufacturing a semiconductor device using the same, and the method of depositing a thin film uses a substrate processing apparatus including a chamber, a substrate support on which a substrate is mounted, a gas supply unit, and a power supply unit that supplies high-frequency and low-frequency power to the chamber, and includes: a step of mounting, on the substrate support, the substrate including a lower thin film deposited under the condition of a process temperature in a low temperature range; a step of depositing an upper thin film on the lower thin film under the condition of the process temperature in the low temperature range; and a step of treating a surface of the upper thin film under the condition of the process temperature in the low temperature range.

Abstract: The present disclosure relates to a data management system and method and, more particularly, to a data management system and method using a docker system in an edge computing environment, the system and method collecting and managing data for each of control operation targets and each of characteristic of the control operation targets using a docker system in an edge computing-cloud computing linkage environment, and enabling an edge server to stably operate in accordance with the characteristics of the control operation targets even though communication between the edge server of an edge computing environment and a cloud server is impossible.

Abstract: The present invention relates to a switching binder binding to an antigen-binding portion of an antibody, a preparation method thereof, and a pharmaceutical composition, an assay kit, and an antigen and antibody assay method, each utilizing the same. A switching binder according to an embodiment of the present invention includes an amino acid sequence selected from framework regions of a heavy chain or a light chain, which constitutes an antigen-binding portion of an antibody, wherein the amino acid sequence includes, in addition to the heavy chain or the light chain, a first antibody-binding portion or a second antibody-binding portion that binds to a framework region of a heavy chain or a light chain, which constitutes the antigen-binding portion, the amino acid sequence being able to bind specifically to the antigen-binding portion of the antibody and then be separated from the framework region when a target antigen is provided.

Abstract: A cartridge for digital real-time Polymerase chain reaction (PCR) includes a microfluidic chamber, a well array, a CMOS photo sensor array and a PCB. The microfluidic chamber includes an inlet formed for injection of a liquid sample, the microfluidic chamber being capable of injection molding. The well array includes a plurality of microwells through which upper and lower portions are perforated and being attached to a lower surface of the microfluidic chamber. The CMOS photo sensor array is disposed below the well array to capture a response image of a sample filled in microwells of the well array. The PCB has a vent formed for vacuum processing of micro flow path formed in the microfluidic chamber, a space formed between the well array and the microfluidic chamber, and a microwell formed in the well array as the liquid sample is injected through the inlet.

Abstract: An immunoassay cartridge is disclosed that can enhance the reliability of an antigen-antibody reaction while increasing a speed of an antigen-antibody reaction. An immunoassay cartridge includes a reaction chamber and a fluorescence sensor assembly. A plurality of antibodies or antigens is attached to an inner surface including a bottom surface of the reaction chamber closest to the sensor. The fluorescence sensor assembly is disposed on a bottom surface of the reaction chamber. Since the bottom surface of the reaction chamber and the upper surface of the fluorescence sensor assembly are arranged to coincide with each other, even if fluid is repeatedly moved in a first direction after the fluid moves in a second direction in the reaction chamber and then moved in the first direction, there is no obstacle in the movement of the fluid. Thus, it is possible to increase the probability of antigen-antibody reaction in the reaction chamber.

Abstract: The wide-angle emission filter includes a base matrix, a photoresist, and a colorant. The base matrix has a flat shape and including a transparent material. The base matrix does not generate fluorescent light or phosphorescent light by an excitation light. The photoresist is disposed in the base matrix. The photoresist is fixed in a solid state through at least one method selected from the group consisting of thermal hardening, photo hardening, and drying. The colorant is disposed in the base matrix and includes light having a predetermined wavelength range. The wide-angle emission filter filters the excitation light regardless of an incident angle of the excitation light.

Abstract: A polymerase chain reaction (PCR) module is detachably combined with a reader system. The reader system includes a central processing unit (CPU) receiving a photo sensing signal to calculate gene amplification amount in real time and generating a temperature control signal based on a temperature signal and a temperature control information. The PCR module includes a photo sensor assembly, a partition wall, and an interface module. The photo sensor assembly includes a plurality of photo sensors and a temperature sensor. The photo sensors are arranged in an array shape to sense emission light generated from a specimen to generate the photo sensing signal. The partition wall is protruded from the photo sensor assembly to define a reaction space in which the specimen is received. The interface module is electrically connected to the photo sensor assembly to transmit the photo sensing signal and the temperature signal to the reader system.

Abstract: A cartridge for digital real-time Polymerase chain reaction (PCR) includes a microfluidic chamber, a well array, a CMOS photo sensor array and a PCB. The microfluidic chamber includes an inlet formed for injection of a liquid sample, the microfluidic chamber being capable of injection molding. The well array includes a plurality of microwells through which upper and lower portions are perforated and being attached to a lower surface of the microfluidic chamber. The CMOS photo sensor array is disposed below the well array to capture a response image of a sample filled in microwells of the well array. The PCB has a vent formed for vacuum processing of micro flow path formed in the microfluidic chamber, a space formed between the well array and the microfluidic chamber, and a microwell formed in the well array as the liquid sample is injected through the inlet.

Abstract: A polymerase chain reaction (PCR) module is detachably combined with a reader system. The reader system includes a central processing unit (CPU) receiving a photo sensing signal to calculate gene amplification amount in real time and generating a temperature control signal based on a temperature signal and a temperature control information. The PCR module includes a photo sensor assembly, a partition wall, and an interface module. The photo sensor assembly includes a plurality of photo sensors and a temperature sensor. The photo sensors are arranged in an array shape to sense emission light generated from a specimen to generate the photo sensing signal. The partition wall is protruded from the photo sensor assembly to define a reaction space in which the specimen is received. The interface module is electrically connected to the photo sensor assembly to transmit the photo sensing signal and the temperature signal to the reader system.

Abstract: A polymerase chain reaction (PCR) module is detachably combined with a reader system. The reader system includes a central processing unit (CPU) receiving a photo sensing signal to calculate gene amplification amount in real time and generating a temperature control signal based on a temperature signal and a temperature control information. The PCR module includes a photo sensor assembly, a partition wall, and an interface module. The photo sensor assembly includes a plurality of photo sensors and a temperature sensor. The photo sensors are arranged in an array shape to sense emission light generated from a specimen to generate the photo sensing signal. The partition wall is protruded from the photo sensor assembly to define a reaction space in which the specimen is received. The interface module is electrically connected to the photo sensor assembly to transmit the photo sensing signal and the temperature signal to the reader system.

Abstract: An immunoassay cartridge is disclosed that can enhance the reliability of an antigen-antibody reaction while increasing a speed of an antigen-antibody reaction. An immunoassay cartridge includes a reaction chamber and a fluorescence sensor assembly. A plurality of antibodies or antigens is attached to an inner surface including a bottom surface of the reaction chamber closest to the sensor. The fluorescence sensor assembly is disposed on a bottom surface of the reaction chamber. Since the bottom surface of the reaction chamber and the upper surface of the fluorescence sensor assembly are arranged to coincide with each other, even if fluid is repeatedly moved in a first direction after the fluid moves in a second direction in the reaction chamber and then moved in the first direction, there is no obstacle in the movement of the fluid. Thus, it is possible to increase the probability of antigen-antibody reaction in the reaction chamber.

Abstract: The wide-angle emission filter includes a base matrix, a photoresist, and a colorant. The base matrix has a flat shape and including a transparent material. The base matrix does not generate fluorescent light or phosphorescent light by an excitation light. The photoresist is disposed in the base matrix. The photoresist is fixed in a solid state through at least one method selected from the group consisting of thermal hardening, photo hardening, and drying. The colorant is disposed in the base matrix and includes light having a predetermined wavelength range. The wide-angle emission filter filters the excitation light regardless of an incident angle of the excitation light.

Abstract: A polymerase chain reaction (PCR) module is detachably combined with a reader system. The reader system includes a central processing unit (CPU) receiving a photo sensing signal to calculate gene amplification amount in real time and generating a temperature control signal based on a temperature signal and a temperature control information. The PCR module includes a photo sensor assembly, a partition wall, and an interface module. The photo sensor assembly includes a plurality of photo sensors and a temperature sensor. The photo sensors are arranged in an array shape to sense emission light generated from a specimen to generate the photo sensing signal. The partition wall is protruded from the photo sensor assembly to define a reaction space in which the specimen is received. The interface module is electrically connected to the photo sensor assembly to transmit the photo sensing signal and the temperature signal to the reader system.