Patents by Inventor Kyung-Ju SUK

Kyung-Ju SUK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • THERMAL DESORPTION SYSTEM AND METHOD OF ANALYZING A SUBSTRATE USING THE SAME
    Publication number: 20180045697
    Abstract: A thermal desorption system including a chamber including a space in which a substrate is heated; a flow compartment within the chamber, the flow compartment providing a separate gas flow space within the chamber; a substrate support that supports the substrate within the flow compartment; a heater that heats the substrate within the flow compartment; and a gas pipe that introduces a carrier gas into the flow compartment and discharges the carrier gas from the flow compartment.
    Type: Application
    Filed: March 14, 2017
    Publication date: February 15, 2018
    Inventors: Kyung-Ju SUK, Eun-Hee PARK, Sang-Hwan KIM, Hye-Kyoung MOON, Jung-Dae PARK, Min-Soo SUH, Kwang-Shin LIM