Abstract: A hydrogen compression system includes: a heat pump part including a heat pump line configured to allow a refrigerant to circulate therethrough, a hydrogen compression part configured to compress hydrogen by being repeatedly heated and cooled, a first circulation line connected to the heat pump line while passing through the hydrogen compression part and configured to allow the refrigerant introduced from the heat pump line to circulate therethrough, a second circulation line provided to pass through the hydrogen compression part and configured to allow a cooling fluid to circulate therethrough, and a cooling unit provided in the second circulation line and configured to cool the cooling fluid, in which the hydrogen compression part is heated by the refrigerant or cooled by the cooling fluid, thereby minimizing electric power consumption and improving energy efficiency.

Abstract: A hydrogen supply method includes a two-side heat exchange mode in which both introducing a second fluid into a hydrogen storage part after the second fluid exchanges heat with a first fluid in a second heat exchanger in a state in which a compressor is driven to compress the first fluid and introducing the second fluid into the hydrogen storage part after the second fluid is heated or cooled in a thermal device are performed. The method also includes a one-side heat exchange mode in which one of introducing the second fluid into the hydrogen storage part after the second fluid exchanges heat with the first fluid in the second heat exchanger in a state in which the compressor is driven to compress the first fluid and introducing the second fluid into the hydrogen storage part after the second fluid is heated or cooled in the thermal device is performed.

Abstract: A hydrogen storage system is disclosed and includes a storage unit including a plurality of unit storage containers, in which metal hydride materials are respectively provided in an interior thereof and which are connected to each other in parallel, and a thermal fluid line defining a thermal fluid passage, which passes via the plurality of unit storage containers continuously and through which a thermal fluid flows for heating or cooling the unit storage containers, thereby enhancing a storage performance and an efficiency of the hydrogen.

Abstract: A substrate processing method is provided. The substrate processing method comprises loading a substrate onto a substrate support inside a chamber, forming a plasma inside the chamber, providing a first DC pulse signal to an electromagnet that generates a magnetic field inside the chamber and processing the substrate with the plasma, wherein the first DC pulse signal is repeated at a first period including a first section and a second section subsequent to the first section, the first DC pulse signal has a first level during the first section, and the first DC pulse signal has a second level different from the first level during the second section.

Abstract: A hydrogen storage device includes a storage container having an accommodation space in an interior thereof, a first metal hydride material provided in the interior of the storage container and that stores hydrogen, and a second metal hydride material provided in the interior of the storage container and that stores the hydrogen at a pressure that is different from that of the first metal hydride material. An advantageous effect of restraining an excessive rise of a pressure of the storage container and enhancing safety and reliability may be obtained.

Abstract: An apparatus for assembling a solid hydrogen storage system includes a lower support installed to support a lower side of material blocks to be assembled, split covers assembled in multiple stages on an upper side of the lower support and forming therein a closed space in which the material blocks are capable of being assembled, the split covers being configured to be separated in a horizontal direction, and gas injection ports provided in the split covers to inject an inert gas into an inner space of the split covers.

Abstract: A system and method for non-isothermal temperature cycling (also called Conduction Temperature Cycling) of a semiconductor device. The method includes inserting a semiconductor device into a testing chamber and thermally coupling the semiconductor device to a heating and cooling element via a vacuum holding component. The method further includes heating and cooling a die portion of the semiconductor device with the heating and cooling element and testing the semiconductor device for component failure caused by thermo-mechanical stress induced by the non-isothermal temperature cycling. In one embodiment, the heating and cooling comprises non-isothermal temperature cycling.

Abstract: A system and method for non-isothermal temperature cycling (also called Conduction Temperature Cycling) of a semiconductor device. The method includes inserting a semiconductor device into a testing chamber and thermally coupling the semiconductor device to a heating and cooling element via a vacuum holding component. The method further includes heating and cooling a die portion of the semiconductor device with the heating and cooling element and testing the semiconductor device for component failure caused by thermo-mechanical stress induced by the non-isothermal temperature cycling. In one embodiment, the heating and cooling comprises non-isothermal temperature cycling.

Abstract: A universal burn-in board for burning-in semiconductor devices. The universal burn-in board is easily reconfigurable so that it may be used with a variety of semiconductor devices having the same pin configuration but different functional characteristics.