Patents by Inventor Kyung-Tae Mun

Kyung-Tae Mun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for cleaning electrostatic chuck of ion implanter
    Publication number: 20080073564
    Abstract: A device for cleaning an electrostatic chuck in an ion implanter includes a power supplier for generating a hot wire voltage, an electrostatic chuck for sucking a wafer, and a hot wire installed in the interior of the electrostatic chuck and driven by the hot wire voltage supplied from the power supplier for emitting heat from the electrostatic chuck.
    Type: Application
    Filed: September 18, 2006
    Publication date: March 27, 2008
    Applicant: Samsung Electronics Co., Ltd.
    Inventor: Kyung-Tae Mun