Abstract: A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.

Abstract: A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.

Abstract: A manufacturing apparatus for a semiconductor device, the manufacturing apparatus including a spin chuck configured to fix and rotate a wafer; a nozzle configured to spray a chemical toward the wafer; a lateral displacement sensor configured to measure a displacement variation to a lateral surface of the wafer while the spin chuck is rotating; and a controller configured to control a position of the nozzle by using the displacement variation while the spin chuck is rotating.

Abstract: A manufacturing apparatus for a semiconductor device, the manufacturing apparatus including a spin chuck configured to fix and rotate a wafer; a nozzle configured to spray a chemical toward the wafer; a lateral displacement sensor configured to measure a displacement variation to a lateral surface of the wafer while the spin chuck is being rotated; and a controller configured to control a position of the nozzle by using the displacement variation while the spin chuck is being rotated.

Abstract: A polishing head includes a carrier body detachably fixed to a drive shaft and having a plurality of first fluid passages penetrating therethrough to extend from an upper surface to a lower surface of the carrier body, upper end portions of the first fluid passages being arranged to be spaced apart from each other in a circumferential direction about a central axis thereof, a flexible membrane clamped to a lower portion of the carrier body to form a plurality of pressurizing chambers, wherein at least one of the pressurizing chambers is divided into a plurality of sub-chambers arranged in a circumferential direction about a central axis of the flexible membrane, the sub-chambers being in fluid communication with lower end portions of the first fluid passages respectively, and a fluid sealing part on the carrier body to support the carrier body to be rotatable and flow a fluid into each of the first fluid passages in a sealed state.

Abstract: A channel equalizer includes a first transformer, an estimator, an average calculator, a second transformer, a coefficient calculator, a compensator, and a third transformer. The first transformer converts normal data into frequency domain data, where a known data sequence is periodically repeated in the normal data. The estimator estimates channel impulse responses (CIR) during known data intervals adjacent to each normal data block. The average calculator calculates an average value of the CIRs. The second transformer converts the average value into frequency domain data. The coefficient calculator calculates equalization coefficients using the average value, and the compensator compensates channel distortion of each normal data block using the coefficients. The third transformer converts the compensated data block into time domain data.

Abstract: A digital television (DTV) transmitter and a method of coding data in the DTV transmitter method are disclosed. A pre-processor pre-processes the enhanced data by coding the enhanced data for forward error correction (FEC) and expanding the FEC-coded enhanced data. A data formatter generates one or more groups of enhanced data packets, each enhanced data packet including the pre-processed enhanced data. And, a packet multiplexer generates at least one burst of enhanced data by multiplexing the one or more groups of enhanced data packets. Herein, each burst of enhanced data includes at least one group of enhanced data packets. The DTV transmitter may further include a scheduler which generates first and second control signals to control operations of the data formatter and the packet multiplexer, respectively.

Abstract: A digital television system performing modulation/demodulation by VSB (vestigial side band) is provided. The invention includes a VSB transmitter including an additional error correction encoder designed such that a signal mapping of a TCM encoder is considered, a multiplexer (MUX), a TCM encoder operating in correspondence with state transition processes of the additional error correction encoder, and a signal transmission part including an RF converter. The invention further includes a VSB receiver including a signal receiver part receiving a signal transmitted from the transmitter, a TCM decoder, a signal processing part including a derandomizer, and an additional error correction decoder part.

Abstract: A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.

Abstract: An image signal modifying method is disclosed. In one aspect, the image signal modifying method includes inputting a gray level interval of a first dynamic capacitance compensation (DCC) lookup table to a current gray level which is a target in a previous image signal when it is overdriven (DTG) and 0 to a gray level of the previous image signal (PIG). The method also includes searching for a data value in an adaptive color correction (ACC) lookup table corresponding to a gray level equal to a numerical value of the DTG (ALT) and performing an algorithm based on the DTG, the ALT, and the gray level interval of the first DCC lookup table. The method further includes generating a second DCC lookup table based on the algorithm, and performing second DCC processing on the input image signal based on the second DCC lookup table.

Abstract: A method of processing a digital television (DTV) signal is disclosed. Herein, the DTV signal is generated by performing Reed-Solomon (RS) encoding on additional data, multiplexing the RS-encoded additional data with main data, RS encoding the multiplexed additional and main data, interleaving the RS-encoded additional and main data, trellis encoding the interleaved additional and main data, and transmitting a Radio Frequency (RF) DTV signal including the trellis-encoded additional and main data. The method to process the DTV signal includes receiving the DTV signal including the additional data multiplexed with the main data through an antenna, in which signaling information is periodically inserted in the additional data. The received DTV signal is demodulated including performing channel equalization on the demodulated DTV signal. Trellis decoding is performed on the channel-equalized DTV signal.

Abstract: A display device may include a display panel that includes a first region and a second region. The display device may include a controller that may receive a first gamma value and a second gamma value, use the first gamma value or a third gamma value to generate first image data, use the first gamma value and the second gamma value to generate a fourth gamma value, and use the fourth gamma value to generate second image data. The display device may include a data driver that may use the first image data and the second image data to generate a first data voltage set and a second data voltage set. The first region may use the first data voltage set to display a first portion of an image. The second region may use the second data voltage set to display a second portion of the image.

Abstract: A method of processing a digital television (DTV) signal is disclosed. Herein, the DTV signal is generated by performing Reed-Solomon (RS) encoding on additional data, multiplexing the RS-encoded additional data with main data, RS encoding the multiplexed additional and main data, interleaving the RS-encoded additional and main data, trellis encoding the interleaved additional and main data, and transmitting a Radio Frequency (RF) DTV signal including the trellis-encoded additional and main data. The method to process the DTV signal includes receiving the DTV signal including the additional data multiplexed with the main data through an antenna, in which signaling information is periodically inserted in the additional data. The received DTV signal is demodulated including performing channel equalization on the demodulated DTV signal. Trellis decoding is performed on the channel-equalized DTV signal.

Abstract: A channel equalizer includes a first transformer, an estimator, an average calculator, a second transformer, a coefficient calculator, a compensator, and a third transformer. The first transformer converts normal data into frequency domain data, where a known data sequence is periodically repeated in the normal data. The estimator estimates channel impulse responses (CIR) during known data intervals adjacent to each normal data block. The average calculator calculates an average value of the CIRs. The second transformer converts the average value into frequency domain data. The coefficient calculator calculates equalization coefficients using the average value, and the compensator compensates channel distortion of each normal data block using the coefficients. The third transformer converts the compensated data block into time domain data.

Abstract: A method of processing a digital television (DTV) signal is disclosed. Herein, the DTV signal is generated by performing Reed-Solomon (RS) encoding on additional data, multiplexing the RS-encoded additional data with main data, RS encoding the multiplexed additional and main data, interleaving the RS-encoded additional and main data, trellis encoding the interleaved additional and main data, and transmitting a Radio Frequency (RF) DTV signal including the trellis-encoded additional and main data. The method to process the DTV signal includes receiving the DTV signal including the additional data multiplexed with the main data through an antenna, in which signaling information is periodically inserted in the additional data. The received DTV signal is demodulated including performing channel equalization on the demodulated DTV signal. Trellis decoding is performed on the channel-equalized DTV signal.

Abstract: A channel equalizer includes a first transformer, an estimator, an average calculator, a second transformer, a coefficient calculator, a compensator, and a third transformer. The first transformer converts normal data into frequency domain data, where a known data sequence is periodically repeated in the normal data. The estimator estimates channel impulse responses (CIR) during known data intervals adjacent to each normal data block. The average calculator calculates an average value of the CIRs. The second transformer converts the average value into frequency domain data. The coefficient calculator calculates equalization coefficients using the average value, and the compensator compensates channel distortion of each normal data block using the coefficients. The third transformer converts the compensated data block into time domain data.

Abstract: A digital television (DTV) transmitter and a method of coding data in the DTV transmitter method are disclosed. A pre-processor pre-processes the enhanced data by coding the enhanced data for forward error correction (FEC) and expanding the FEC-coded enhanced data. A data formatter generates one or more groups of enhanced data packets, each enhanced data packet including the pre-processed enhanced data. And, a packet multiplexer generates at least one burst of enhanced data by multiplexing the one or more groups of enhanced data packets. Herein, each burst of enhanced data includes at least one group of enhanced data packets. The DTV transmitter may further include a scheduler which generates first and second control signals to control operations of the data formatter and the packet multiplexer, respectively.

Abstract: A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.

Abstract: A display device may include a display panel that includes a first region and a second region. The display device may include a controller that may receive a first gamma value and a second gamma value, use the first gamma value or a third gamma value to generate first image data, use the first gamma value and the second gamma value to generate a fourth gamma value, and use the fourth gamma value to generate second image data. The display device may include a data driver that may use the first image data and the second image data to generate a first data voltage set and a second data voltage set. The first region may use the first data voltage set to display a first portion of an image. The second region may use the second data voltage set to display a second portion of the image.

Abstract: A DTV transmitter includes a pre-processor pre-processing enhanced data, a data formatter generating enhanced data packets including the pre-processed enhanced data, and a multiplexer multiplexing the enhanced data packets with main data packets. The transmitter further includes an RS encoder RS-coding the multiplexed packets by adding systematic RS parity data to each main data packet and by adding non-systematic RS parity place holders to each enhanced data packet, and a data interleaver interleaving the RS-coded packets. The non-systematic RS parity place holders are placed after the enhanced data within each interleaved enhanced data packet, and a sequence of known data place holders is periodically included in the interleaved enhanced data packets.