Patents by Inventor Kyunghwan NOH

Kyunghwan NOH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE BY USING THE SAME
    Publication number: 20230176477
    Abstract: A photoresist composition includes an organometallic compound including at least one metal-ligand bond, the organometallic compound including a metal core and at least one organic ligand bonded to the metal core, and being configured such that the at least one metal-ligand bond is not breakable by exposure to light or moisture; a photoinitiator generating an acid or a radical in response to exposure to light; and a solvent.
    Type: Application
    Filed: June 15, 2022
    Publication date: June 8, 2023
    Inventors: Sukkoo HONG, Moohyun KOH, Kyungoh KIM, Yechan KIM, Kyunghwan NOH, Sungan DO, Hyun-Ji SONG