Abstract: The invention relates to a gas filling and dispensing device that comprises a body to be positioned in the opening of a pressurized gas storage tank, a gas-tapping circuit extending between a first upstream end to be connected to the inside of the tank and a second downstream end to be connected to a gas user, wherein the tapping circuit includes a first insulation valve, the device further including a safety valve subjected to the tank pressure for blocking or selectively opening a passage for the gas from the tank towards a discharge area based on the temperature and/or pressure of the gas in the tank relative to at least one predetermined threshold, characterized in that the discharge area of the safety valve is located upstream from the first insulation valve.

Abstract: A method of cleaning a film-forming apparatus to remove at least a part of a silicon-based material deposited on a constituent member of the film-forming apparatus after used to form thin films includes introducing a first-gas including fluorine gas and a second gas including nitrogen monoxide gas into the film-forming apparatus, and heating the constituent member. The constituent member includes quartz or silicon carbide, and the silicon-based material includes silicon nitride.

Abstract: The present invention relates to a process and apparatus for the separation of air by cryogenic distillation. In particular, it relates to a process for separation of air using three cryogenic distillation columns for the production of gaseous oxygen. Certain embodiments of the invention are particularly efficient for the production of gaseous oxygen at pressures between 30 and 45 bars abs, in which the oxygen is produced by removing liquid oxygen from a distillation column, pressurizing the oxygen and vaporizing the pressurized liquid by heat exchange with air.

Abstract: The invention relates to an on-site medical gas production plant (100) comprising a unit (50) for purifying gas, such as air, a first vessel (A) for storing purified gas, and a main gas line (10) fluidically connecting the gas purification unit (50) to the said first storage vessel (A). It furthermore comprises a three-way solenoid valve (VA) arranged on the main gas line (10) upstream of the first storage vessel (A), and furthermore connected to the atmosphere (at 12) via a vent line (11), as well as an operating device (4) which controls at least the three-way solenoid valve (VA), and at least a first gas analysis device (D1) of which a first measurement line (29) is fluidically connected (at 28) to the main line (10), upstream of the three-way solenoid valve (VA), and which is electrically connected to the said operating device (4).

Abstract: The invention relates to a method for operating a plant (100) for on-site production of medical gas, such as air or oxygen, comprising a main gas line (10) comprising, in series, a first vessel (A) for storing gas and a second vessel (B) for storing purified gas, and a secondary line (20) fluidically connected to the main line (10), downstream of the first vessel (A) for storing gas, and comprising a third vessel (C) for storing gas, the main gas line (10) and the secondary line (20) each supplying at least one gas consumer site (30), in particular a network of pipes in a hospital.