Patents by Inventor Lach OTTO

Lach OTTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for liquid treatment of wafer shaped articles
    Patent number: 9355883
    Abstract: In an apparatus and method for treating a wafer-shaped article, a spin chuck is provided for holding a wafer-shaped article in a predetermined orientation wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck. A heating assembly comprising at least one infrared heater is mounted above the upper surface of the spin chuck and below a wafer-shaped article when mounted on the spin chuck. The heating assembly is stationary in relation to rotation of the spin chuck.
    Type: Grant
    Filed: September 9, 2011
    Date of Patent: May 31, 2016
    Assignee: LAM RESEARCH AG
    Inventors: Karl-Heinz Hohenwarter, Lach Otto
  • METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
    Publication number: 20130061873
    Abstract: In an apparatus and method for treating a wafer-shaped article, a spin chuck is provided for holding a wafer-shaped article in a predetermined orientation wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck. A heating assembly comprising at least one infrared heater is mounted above the upper surface of the spin chuck and below a wafer-shaped article when mounted on the spin chuck. The heating assembly is stationary in relation to rotation of the spin chuck.
    Type: Application
    Filed: September 9, 2011
    Publication date: March 14, 2013
    Applicant: LAM RESEARCH AG
    Inventors: Karl-Heinz HOHENWARTER, Lach OTTO