Patents by Inventor Laird MacDowell

Laird MacDowell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Controlled aging of photoresists for faster photospeed
    Patent number: 6664023
    Abstract: A method for the controlled aging of a photoresist which provides an aged photoresist that has a targeted photospeed which is faster than a conventional unaged photoresist is provided. Specifically, the inventive method includes the step of aging a solution containing at least a photoresist resin composition at a temperature below the thermal decomposition of the photoresist resin composition, but not below 20° C., for a time period that is effective in achieving a targeted photospeed which is faster than a photospeed of an unaged photoresist.
    Type: Grant
    Filed: March 13, 2001
    Date of Patent: December 16, 2003
    Assignee: International Business Machines Corporation
    Inventors: Laird MacDowell, Erik Puttlitz
  • Controlled aging of photoresists for faster photospeed
    Publication number: 20020164539
    Abstract: A method for the controlled aging of a photoresist which provides an aged photoresist that has a targeted photospeed which is faster than a conventional unaged photoresist is provided. Specifically, the inventive method includes the step of aging a solution containing at least a photoresist resin composition at a temperature below the thermal decomposition of the photoresist resin composition, but not below 20° C., for a time period that is effective in achieving a targeted photospeed which is faster than a photospeed of an unaged photoresist.
    Type: Application
    Filed: March 13, 2001
    Publication date: November 7, 2002
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Laird MacDowell, Erik Puttlitz