Patents by Inventor Lakshman Deenadayalan

Lakshman Deenadayalan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer inspection recipe setup
    Patent number: 9714905
    Abstract: Methods and systems for setting up a wafer inspection recipe are provided. Inspection results produced by complete wafer inspection recipe candidates, each of which includes one or more optical mode candidates with at least one set of defect detection parameters, are compared to determine which of the complete wafer inspection recipe candidates is the best for use as the wafer inspection recipe. The method does not involve making any decisions regarding performance of the complete wafer inspection recipe candidates until after the inspection results have been compared. In other words, the method does not involve selecting optical mode(s) that will be used in the wafer inspection recipe followed by selecting the defect detection parameters for the selected optical mode(s). In this manner, a greater number of optical mode and defect detection parameters can be considered in an efficient manner to determine the best wafer inspection recipe for any given wafer.
    Type: Grant
    Filed: June 21, 2014
    Date of Patent: July 25, 2017
    Assignee: KLA-Tencor Corp.
    Inventors: Martin Plihal, Deepak Gupta, Vidyasagar Anantha, Premkumar Vijayaraman, Lakshman Deenadayalan