Patents by Inventor Lalita A. Balasubramanian

Lalita A. Balasubramanian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Computer-implemented methods and systems for classifying defects on a specimen
    Patent number: 8532949
    Abstract: Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.
    Type: Grant
    Filed: October 12, 2005
    Date of Patent: September 10, 2013
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Cho Huak Teh, Tommaso Torelli, Dominic David, Chiuman Yeung, Michael Gordon Scott, Lalita A. Balasubramanian, Lisheng Gao, Tong Huang, Jianxin Zhang, Michal Kowalski, Jonathan Oakley
  • Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
    Patent number: 8126255
    Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
    Type: Grant
    Filed: September 19, 2008
    Date of Patent: February 28, 2012
    Assignee: KLA-Tencor Corp.
    Inventors: Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecelia Campochiaro, Chris Maher, Brian Duffy, Aneesh Khullar, Alpa Kohli, Lalita A. Balasubramanian, Santosh Bhattacharyya, Mohan Mahadevan
  • SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS
    Publication number: 20090080759
    Abstract: Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
    Type: Application
    Filed: September 19, 2008
    Publication date: March 26, 2009
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Kris Bhaskar, Chetana Bhaskar, Ashok Kulkarni, Eliezer Rosengaus, Cecilia Campochiaro, Chris Maher, Brian Duffy, Aneesh Khullar, Alpa Kohli, Lalita A. Balasubramanian, Santosh Bhattacharyya, Mohan Mahadevan
  • Computer-implemented methods and systems for classifying defects on a specimen
    Publication number: 20060082763
    Abstract: Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.
    Type: Application
    Filed: October 12, 2005
    Publication date: April 20, 2006
    Inventors: Cho Teh, Tommaso Torelli, Dominic David, Chiuman Yeung, Michael Scott, Lalita Balasubramanian, Lisheng Gao, Tong Huang, Jianxin Zhang, Michal Kowalski, Jonathan Oakley