Patents by Inventor Lan Duong

Lan Duong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shadow frame having alignment inserts
    Patent number: 8251009
    Abstract: The present invention generally includes a shadow frame with alignment inserts that may permit the shadow frame to be properly aligned on the susceptor. The shadow frame may have one or more alignment inserts. The alignment inserts may be coupled to a cavity formed in the bottom surface of the shadow frame. The alignment inserts may be shaped to receive an alignment button that may be present on the susceptor. Thus, as the susceptor raises to the processing position and retrieves the shadow frame, the shadow frame may align properly on the susceptor.
    Type: Grant
    Filed: May 13, 2009
    Date of Patent: August 28, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Lan Duong, William N. Sterling, John M. White
  • Susceptor with insulative inserts
    Patent number: 7959735
    Abstract: A method and apparatus for reducing arcing in a plasma processing system when processing large area substrates which contain one or more holes. In one embodiment of the invention, a substrate support member includes an electrically insulating insert located beneath a hole in an insulating, large area substrate. The insulating insert is made of aluminum oxide, and is located within a hole in the support member such that the insert is disposed beneath a hole in a glass substrate. The substrate support member is made of aluminum with an anodized surface.
    Type: Grant
    Filed: February 8, 2007
    Date of Patent: June 14, 2011
    Assignee: Applied Materials, Inc.
    Inventors: William N. Sterling, Lan Duong, Gaku Furuta
  • SHADOW FRAME HAVING ALIGNMENT INSERTS
    Publication number: 20090283036
    Abstract: The present invention generally includes a shadow frame with alignment inserts that may permit the shadow frame to be properly aligned on the susceptor. The shadow frame may have one or more alignment inserts. The alignment inserts may be coupled to a cavity formed in the bottom surface of the shadow frame. The alignment inserts may be shaped to receive an alignment button that may be present on the susceptor. Thus, as the susceptor raises to the processing position and retrieves the shadow frame, the shadow frame may align properly on the susceptor.
    Type: Application
    Filed: May 13, 2009
    Publication date: November 19, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Lan Duong, William N. Sterling, John M. White
  • SUSCEPTOR WITH INSULATIVE INSERTS
    Publication number: 20080194169
    Abstract: A method and apparatus for reducing arcing in a plasma processing system when processing large area substrates which contain one or more holes. In one embodiment of the invention, a substrate support member includes an electrically insulating insert located beneath a hole in an insulating, large area substrate. The insulating insert is made of aluminum oxide, and is located within a hole in the support member such that the insert is disposed beneath a hole in a glass substrate. The substrate support member is made of aluminum with an anodized surface.
    Type: Application
    Filed: February 8, 2007
    Publication date: August 14, 2008
    Inventors: William N. Sterling, Lan Duong, Gaku Furuta