Patents by Inventor Lance Dyrdahl

Lance Dyrdahl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Baffle plate and showerhead assemblies and corresponding manufacturing method
    Patent number: 10483092
    Abstract: A baffle plate assembly including a baffle plate, a ring and support members. The baffle plate has an outer diameter and configured to distribute gases through a showerhead of a showerhead assembly of a substrate processing system. The gases are received from a stem of the showerhead assembly. The ring has an inner diameter and configured to be disposed in a ring channel of the showerhead assembly. The inner diameter is greater than the outer diameter of the baffle plate. The support members extend from the baffle plate to the ring. The ring and the support members hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.
    Type: Grant
    Filed: April 13, 2016
    Date of Patent: November 19, 2019
    Assignee: LAM RESEARCH CORPORATION
    Inventors: Eric Russell Madsen, Lance Dyrdahl
  • BAFFLE PLATE AND SHOWERHEAD ASSEMBLIES AND CORRESPONDING MANUFACTURING METHOD
    Publication number: 20170301515
    Abstract: A baffle plate assembly including a baffle plate, a ring and support members. The baffle plate has an outer diameter and configured to distribute gases through a showerhead of a showerhead assembly of a substrate processing system. The gases are received from a stem of the showerhead assembly. The ring has an inner diameter and configured to be disposed in a ring channel of the showerhead assembly. The inner diameter is greater than the outer diameter of the baffle plate. The support members extend from the baffle plate to the ring. The ring and the support members hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.
    Type: Application
    Filed: April 13, 2016
    Publication date: October 19, 2017
    Inventors: Eric Russell Madsen, Lance Dyrdahl