Patents by Inventor Lance Hellwig

Lance Hellwig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Modified susceptor for barrel reactor
    Publication number: 20060231035
    Abstract: A susceptor for supporting wafers during an chemical vapor deposition process. The susceptor has recesses and orifices disposed in the recesses extending to a central passage of the susceptor. The susceptor has exhaust openings disposed in the top of the susceptor to allow gas from the central passage of the susceptor to exit out the openings. A baffle plate covers the exhaust openings and a vertical space is created between the baffle plate and the top of the susceptor to allow gas to exit from the central passage to outside the susceptor. The bottom of the susceptor also has exhaust openings disposed therein. These openings allow gas from the central passage to exit the susceptor.
    Type: Application
    Filed: April 15, 2005
    Publication date: October 19, 2006
    Applicant: MEMC Electronic Materials, Inc.
    Inventor: Lance Hellwig