Patents by Inventor Langfeng WEN

Langfeng WEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for conducting optical measurement usingfull Mueller matrix ellipsometer
    Patent number: 11187649
    Abstract: A method for conducting optical measurement using a full Mueller matrix ellipsometer, which belongs to the technical field of optical measurements. The optical measurement method comprises: constructing an experimental optical path of a full Mueller matrix ellipsometer; conducting complete regression calibration on the full Mueller matrix ellipsometer; placing a sample to be measured on a sample platform, and obtaining an experimental Fourier coefficient of the sample to be measured; and according to the experimental Fourier coefficient of the sample to be measured, obtaining information about the sample to be measured.
    Type: Grant
    Filed: August 19, 2014
    Date of Patent: November 30, 2021
    Assignee: AK OPTICS TECHNOLOGY CO., LTD.
    Inventors: Tao Liu, Gaozeng Cui, Guoguang Li, Wei Xiong, Langfeng Wen
  • METHOD FOR CONDUCTING OPTICAL MEASUREMENT USINGFULL MUELLER MATRIX ELLIPSOMETER
    Publication number: 20190317010
    Abstract: A method for conducting optical measurement using a full Mueller matrix ellipsometer, which belongs to the technical field of optical measurements. The optical measurement method comprises: constructing an experimental optical path of a full Mueller matrix ellipsometer; conducting complete regression calibration on the full Mueller matrix ellipsometer; placing a sample to be measured on a sample platform, and obtaining an experimental Fourier coefficient of the sample to be measured; and according to the experimental Fourier coefficient of the sample to be measured, obtaining information about the sample to be measured.
    Type: Application
    Filed: August 19, 2014
    Publication date: October 17, 2019
    Applicant: BEI OPTICS TECHNOLOGY COMPANY LIMITED
    Inventors: Tao LIU, Gaozeng CUI, Guoguang LI, Wei XIONG, Langfeng WEN