Patents by Inventor LANTIAN ZHAO

LANTIAN ZHAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210343852
    Abstract: The present disclosure provides a field-effect transistor structure and a method for fabricating the same. The method comprises: providing a substrate, and depositing at least one first material layer and at least one second material layer on a surface of the substrate; defining an active region and a shallow trench isolation region; etching the active region to form a channel region, a source region and a drain region; corroding the first material layer or second material layer in the groove region to obtain at least one nano-wire channel; depositing a dielectric layer and a gate structure layer on a surface of nano-wire channel; and fabricating a gate electrode, a source electrode and a drain electrode on surfaces of the gate structure layer, the source region and the drain region to complete the fabrication of the field-effect transistor.
    Type: Application
    Filed: September 28, 2018
    Publication date: November 4, 2021
    Applicant: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES
    Inventors: ZHONGYING XUE, LANTIAN ZHAO, QINGTAI ZHAO, WENJIE YU, ZENGFENG DI, MIAO ZHANG