Abstract: One or more embodiments described herein generally relate to systems and methods for calibrating an optical emission spectrometer (OES) used for processing semiconductor substrates. In embodiments herein, a light fixture is mounted to a plate within a process chamber. A light source is positioned within the light fixture such that it provides an optical path that projects directly at a window through which the OES looks into the process chamber for its reading. When the light source is on, the OES measures the optical intensity of radiation from the light source. To calibrate the OES, the optical intensity of the light source is compared at two separate times when the light source is on. If the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time, the OES is modified.

Abstract: One or more embodiments described herein generally relate to systems and methods for calibrating an optical emission spectrometer (OES) used for processing semiconductor substrates. In embodiments herein, a light fixture is mounted to a plate within a process chamber. A light source is positioned within the light fixture such that it provides an optical path that projects directly at a window through which the OES looks into the process chamber for its reading. When the light source is on, the OES measures the optical intensity of radiation from the light source. To calibrate the OES, the optical intensity of the light source is compared at two separate times when the light source is on. If the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time, the OES is modified.

Abstract: A method, apparatus and computer program product are provided for validating electronic distribution transactions and reducing non-compliant electronic distribution transactions. A distribution application enables users to enter details relating to a retirement account distribution. A tax service integrated with the distribution application provides scenario-specific tax withholding information, and enforces relevant tax withholding rules. A user provides withholding information and the system ensures compliance by validating the transaction against the withholding rules. The system displays to the user any errors that need to be corrected, and a breakdown of the proceeds from the transaction. The tax service is implemented remotely from the distribution application so that changing tax regulations may be implemented into the tax service without impacting the distribution application.