Patents by Inventor Larissa VON RIEWEL

Larissa VON RIEWEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORT ELEMENT FOR A SUPPORT RACK
    Publication number: 20190333787
    Abstract: A substrate support element for a support rack for thermal treatment of a substrate is provided. The substrate support element includes a support surface for the substrate. The substrate support element is a composite body that includes a first composite component and a second composite component, whereby the first composite component has a thermal conductivity in the range of 0.5 to 40 W/(m·K) and the second composite component has a thermal conductivity in the range of 70 to 450 W/(m·K).
    Type: Application
    Filed: May 22, 2017
    Publication date: October 31, 2019
    Inventors: Thomas PIELA, Larissa VON RIEWEL