Patents by Inventor Larry Bourget

Larry Bourget has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for plasma generation
    Patent number: 11664197
    Abstract: A plasma source is provided that includes a body defining an input port, an output port, and at least one discharge section extending along a central longitudinal axis between the input port and the output port. The at least one discharge section includes a return electrode defining a first generally cylindrical interior volume having a first interior diameter, a supply plate comprising a supply electrode, the supply plate defining a second generally cylindrical interior volume having a second interior diameter, and at least one spacer defining a third generally cylindrical interior volume having a third interior diameter. The third interior diameter is different from the first or second interior diameter. The at least one discharge section is formed from the spacer arranged between the return electrode and the supply plate along the central longitudinal axis to define a generally cylindrical discharge gap for generating a plasma therein.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: May 30, 2023
    Assignee: MKS Instruments, Inc.
    Inventors: Gordon Hill, Andrew Cowe, Ron Collins, Larry Bourget
  • METHOD AND APPARATUS FOR PLASMA GENERATION
    Publication number: 20230036853
    Abstract: A plasma source is provided that includes a body defining an input port, an output port, and at least one discharge section extending along a central longitudinal axis between the input port and the output port. The at least one discharge section includes a return electrode defining a first generally cylindrical interior volume having a first interior diameter, a supply plate comprising a supply electrode, the supply plate defining a second generally cylindrical interior volume having a second interior diameter, and at least one spacer defining a third generally cylindrical interior volume having a third interior diameter. The third interior diameter is different from the first or second interior diameter. The at least one discharge section is formed from the spacer arranged between the return electrode and the supply plate along the central longitudinal axis to define a generally cylindrical discharge gap for generating a plasma therein.
    Type: Application
    Filed: August 2, 2021
    Publication date: February 2, 2023
    Inventors: Gordon Hill, Andrew Cowe, Ron Collins, Larry Bourget