Abstract: A wirebond probe head is modified for use in forming raised portions from material. The modified head includes a main portion and a sleeve, with the sleeve functioning as a shroud to reduce the tendency of forged material to exude from the periphery of the wirebond probe. The sleeve may also be vibrationally isolated from the main portion of the head in order to attenuate vibrational energy transferred from the main portion of the head to the sleeve. The inventive head functions by being brought into close proximity to a surface material and applying energy. This results in an ultrasonically formed elevated surface irregularity, or an ultrasonic forging splash, which useful as an electrical contact pad for permanent and semipermanent electrical connections.

Abstract: The invention is a product and method for forming same comprising a storage contact capacitor of a dynamic random access memory (DRAM) device wherein at least two annular rings and a vertical fin of silicon are fabricated in a self-aligned opening parallel to and in contact with the contact area of the substrate. The rings and fin comprise the storage node of the capacitor, and the fin is substantially centered in the rings. The fin is fabricated by forming silicon in a channel remaining after alternating layers of silicon and oxide are deposited in the opening. The final deposition of oxide is subjected to a spacer etch thereby retaining the final oxide only on sidewalls of the channel. The final oxide then functions as a masking pattern for extending the channel by subjecting the alternating layers to subsequent etches. The silicon fin contacts all of the silicon rings thereby providing electrical communication between the fin and the rings.