Abstract: A beam direction sensor for determining the direction of each beam in an array of light beams. The invention basically consists of a screen positioned to intersect the array of beams and a video camera to record the position of the images of the intersections. The screen can be any of a wide variety of screens that produce an image of the beams when illuminated with the beam. These include frosted glass and various diffusers. A preferred screen is a holographic diffusers.

Abstract: A beam direction sensor for determining the direction of each beam in an array of light beams. The invention basically consists of a screen positioned to intersect the array of beams and a video camera to record the position of the images of the intersections. The screen can be any of a wide variety of screens that produce an image of the beams when illuminated with the beam. These include frosted glass and various diffusers. A preferred screen is a holographic diffusers.

Abstract: A MEMS mirror array in which the MEMS mirrors are driven in two axes by vertical comb drive actuators. Tortional elements with conductive comb fingers are utilized to provide the two axis actuation. A MEMS mirror control system supplies electrical voltage potentials between inside pivoting support frame conductive comb fingers and mirror frame conductive comb fingers and supplies electrical voltage potentials between MEMS mirror array support frame conductive comb fingers and outside pivoting support frame conductive comb fingers. In preferred embodiments two MEMS mirror arrays are utilized to provide beam direction in a cross connect switch.