Patents by Inventor Larry Gerszewski

Larry Gerszewski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer gripper
    Patent number: 5700046
    Abstract: A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.
    Type: Grant
    Filed: September 13, 1995
    Date of Patent: December 23, 1997
    Assignee: Silicon Valley Group, Inc.
    Inventors: Matthew J. Van Doren, Don Sauer, Alexander H. Slocum, David Pap Rocki, Johann Tam, Larry Gerszewski