Patents by Inventor Larry J. Bustos

Larry J. Bustos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polish (CMP) conditioning-disk holder
    Patent number: 6887138
    Abstract: A chemical mechanical polishing (CMP) tool holds a conditioning disk that is used to remove impurities from a polishing disk used to planarize surfaces, such as a semiconductor surface. The tool uses an elastic disk that is positioned between a clamp and a gimbal hub that pivotally overlies a gimbal plate. The elastic disk is a polymer material, such as for example polytetrafluoroethylene (PTFE). The elastic disk has a central opening and is radially solid around the central opening. Alignment holes and drive mechanism holes pierce the elastic disk which functions to rotate the tool with minimal friction and provides a liquid seal from CMP fluids. Access holes in the gimbal plate permit easy installation and removal of the individual components. The PTFE disk is strong and durable enough to withstand high torque and provide lengthy operation without maintenance.
    Type: Grant
    Filed: June 20, 2003
    Date of Patent: May 3, 2005
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Brian E. Bottema, Larry J. Bustos, Martin W. Cain, Nathan R. Brown
  • Chemical mechanical polish (CMP) conditioning-disk holder
    Publication number: 20040259487
    Abstract: A chemical mechanical polishing (CMP) tool holds a conditioning disk that is used to remove impurities from a polishing disk used to planarize surfaces, such as a semiconductor surface. The tool uses an elastic disk that is positioned between a clamp and a gimbal hub that pivotally overlies a gimbal plate. The elastic disk is a polymer material, such as for example polytetrafluoroethylene (PTFE). The elastic disk has a central opening and is radially solid around the central opening. Alignment holes and drive mechanism holes pierce the elastic disk which functions to rotate the tool with minimal friction and provides a liquid seal from CMP fluids. Access holes in the gimbal plate permit easy installation and removal of the individual components. The PTFE disk is strong and durable enough to withstand high torque and provide lengthy operation without maintenance.
    Type: Application
    Filed: June 20, 2003
    Publication date: December 23, 2004
    Inventors: Brian E. Bottema, Larry J. Bustos, Martin W. Cain, Nathan R. Brown
  • Method of testing a semiconductor device by automatically measuring probe tip parameters
    Patent number: 6127831
    Abstract: An integrated probe tip (20) parameter measuring device (70) is integrated onto the chuck (24) or substrate holder of a probe test station (10). Probe tip (20) force can be simultaneously measured for either a single probe tip, several probe, or all of the probe tips on a probe card (18). Integrating the measurement of probe tip (20) parameters such as probe tip force into a test station (10) yields real-time data about the probe process and allows feedback between measured probe tip parameters and probe chuck overdrive in the vertical direction. This integrated testing is done by periodically testing probe tip (20) parameters during the probing of die (26) on a wafer (22).
    Type: Grant
    Filed: April 21, 1997
    Date of Patent: October 3, 2000
    Assignee: Motorola, Inc.
    Inventors: Theodore Andrew Khoury, Raun L. Goode, Larry J. Bustos