Patents by Inventor Larry J. Fisk, II

Larry J. Fisk, II has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11536755
    Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: December 27, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Benjamin J. Gitlin, Mariusz Oldziej, Aaron M. Burry, Matthew G. Harrington, Aaron T. Radomski
  • Patent number: 11367592
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: June 21, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathan W. Smyka
  • Publication number: 20220005674
    Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
    Type: Application
    Filed: September 21, 2021
    Publication date: January 6, 2022
    Inventors: Aaron T. RADOMSKI, Benjamin J. GITLIN, Larry J. FISK, II, Mariusz OLDZIEJ, Aaron M. BURRY, Jonathan W. SMYKA, Alexei MARAKHTANOV, Bing JI, Felix Leib KOZAKEVICH, John HOLLAND, Ranadeep BHOWMICK
  • Publication number: 20210373054
    Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Larry J. FISK, II, Benjamin J. GITLIN, Mariusz OLDZIEJ, Aaron M. BURRY, Matthew G. HARRINGTON, Aaron T. RADOMSKI
  • Patent number: 11158488
    Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: October 26, 2021
    Assignees: MKS Instruments, Inc., Lam Research Corporation
    Inventors: Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron M. Burry, Jonathan W. Smyka, Alexei Marakhtanov, Bing Ji, Felix Leib Kozakevich, John Holland, Ranadeep Bhowmick
  • Patent number: 10930470
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Grant
    Filed: December 11, 2019
    Date of Patent: February 23, 2021
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
  • Publication number: 20210013007
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Application
    Filed: June 18, 2020
    Publication date: January 14, 2021
    Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
  • Publication number: 20200411289
    Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.
    Type: Application
    Filed: June 26, 2019
    Publication date: December 31, 2020
    Inventors: Aaron T. RADOMSKI, Benjamin J. GITLIN, Larry J. FISK, II, Mariusz OLDZIEJ, Aaron M. BURRY, Jonathan W. SMYKA, Alexei MARAKHTANOV, Bing JI, Felix Leib KOZAKEVICH, John HOLLAND, Ranadeep BHOWMICK
  • Patent number: 10727027
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Grant
    Filed: February 12, 2019
    Date of Patent: July 28, 2020
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathan W. Smyka
  • Publication number: 20200144025
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Application
    Filed: December 11, 2019
    Publication date: May 7, 2020
    Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
  • Patent number: 10546724
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: January 28, 2020
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Ky Luu, Larry J. Fisk, II, Ross Reinhardt, Matthew G. Harrington, Amish Rughoonundon, Jesse N. Klein, Aaron M. Burry
  • Publication number: 20190214231
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Application
    Filed: February 12, 2019
    Publication date: July 11, 2019
    Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
  • Patent number: 10217609
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: February 26, 2019
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathon W. Smyka
  • Publication number: 20180330921
    Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.
    Type: Application
    Filed: May 9, 2018
    Publication date: November 15, 2018
    Inventors: Aaron T. RADOMSKI, Ky LUU, Larry J. FISK, II, Ross REINHARDT, Matthew G. HARRINGTON, Amish RUGHOONUNDON, Jesse N. KLEIN, Aaron M. BURRY
  • Publication number: 20180294141
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Application
    Filed: June 12, 2018
    Publication date: October 11, 2018
    Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
  • Patent number: 10049857
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: August 14, 2018
    Assignee: MKS Instruments, Inc.
    Inventors: Larry J. Fisk, II, Aaron T. Radomski, Jonathan Smyka
  • Patent number: 9947514
    Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: April 17, 2018
    Assignee: MKS Instruments, Inc.
    Inventors: Aaron T. Radomski, Sang Won Lee, Larry J. Fisk, II, Jonathan W. Smyka
  • Publication number: 20170062187
    Abstract: An RF supply system in which a bias RF generator operates at a first frequency to provide a bias RF output signal and a source RF generator operates at a second frequency to provide a source RF output signal. The RF output power signals are applied to a load, such as a plasma chamber. The source RF generator detects a triggering event. In response to the triggering event, the source RF generator initiates adding frequency offsets to the source RF output signal in order to respond to impedance fluctuations in the plasma chamber that occur with respect to the triggering event. The triggering event detected by the source RF generator can be received from the bias RF generator in the form of a control signal that varies in accordance with the bias RF output signal.
    Type: Application
    Filed: August 15, 2016
    Publication date: March 2, 2017
    Applicant: MKS Instruments, Inc.
    Inventors: Aaron T. RADOMSKI, Sang Won LEE, Larry J. FISK, II, Jonathan W. SMYKA
  • Publication number: 20160163514
    Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
    Type: Application
    Filed: November 30, 2015
    Publication date: June 9, 2016
    Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan SMYKA
  • Patent number: 9136093
    Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: September 15, 2015
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Larry J. Fisk, II, Aaron T. Radomski, Jaehyun Kim, Sang-Won Lee, Jonathan Smyka