Abstract: An injector system for a vertical furnace which has a pedestal and a semiconductor article support within a process container. The injector system includes an injector which is an elongate tube extending into the process chamber. The tube includes a circuitous section in the area of the pedestal to increase residence time for the contents of the tube prior to introduction to the semiconductor articles. A substantially direct section leads from the circuitous section to a discharge end located above the semiconductor article support. The injector system further includes a vertical column heater arranged with the vapor outlet at the upper end of the heater connected via a coupling to the injector in an arrangement to reduce thermal loss.

Abstract: A tow truck of the type having wheels supporting it for movement along a path defined by a subfloor conveyor. There is a vertically movable tow pin at the front of the truck for vertical movement in and out of driving engagement with the conveyor. An accumulation bumper at the front of the truck is movable between a forward normal running position and a rearwardly retracted accumulating position when the bumper engages an object ahead of the truck. A connecting mechanism between the bumper and tow pin includes at least one bell crank member pivoted for rotation on a transverse axis behind the tow pin with a first lever arm projecting upwardly and connected by a link to the bumper, together with a second lever arm projecting forwardly and connected to a vertical lift rod, the upper end of which is operatively connected to the upper portion of the tow pin.