Patents by Inventor Larry L. Berger

Larry L. Berger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7205086
    Abstract: A photoresist element comprising a substrate; an etch resistant layer; and at least one photoresist layer prepared from a photoresist composition comprising a polymer selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf?)OH, wherein Rf and Rf? are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10; (d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole) or CX2?CY2 where X?F or CF3 and Y?—H or amorphous vinyl copolymers of perfluoro(2,2-dimethyl-1,3-dioxole) and CX2?CY2; and (e) nitr
    Type: Grant
    Filed: November 26, 2001
    Date of Patent: April 17, 2007
    Assignee: E. I. du Pont de Nemours and Company
    Inventors: Larry L. Berger, Frank L. Schadt, III
  • Patent number: 7108953
    Abstract: The invention relates to a photoresist composition comprising a polymeric binder; a photoactive component; and at least one dissolution inhibitor comprising a paraffinic or cycloparaffinic compound containing at least one functional group having the structure —C(Rf)(Rf?)OR wherein Rf and Rf? are the same or different fluoroalkyl groups of from one or taken together are (CF2)a wherein a is an integer ranging from 2 to about 10 and R is a hydrogen atom or an acid labile protecting group. Typically, the dissolution inhibitor has an absorption coefficient of less than about 4.0 ?m at a wavelength of 157 nm.
    Type: Grant
    Filed: October 12, 2001
    Date of Patent: September 19, 2006
    Assignee: E. I. du Pont de Nemours and Company
    Inventors: Larry L. Berger, Jerald Feldman, Viacheslav Alexandrovich Petrov, Frank L. Schadt, III, Andrew E. Feiring, Fredrick Claus Zumsteg, Jr.
  • Patent number: 7045268
    Abstract: A photoresist composition having (A) at least two polymers selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf?)OH wherein Rf and Rf? are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10;(d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole or CX2?CY2 where X=F or CF3 and Y=H or amorphous vinyl copolymers of perfluoro(2,2-dimethyl-1,3-dioxole) and CX2?CY2; and (e) nitrile/fluoroalcohol-containing polymers prepared from substituted or unsubstituted vinyl ethers; and (B) at least
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: May 16, 2006
    Assignee: E.I. du Pont de Nemours and Company
    Inventors: Larry L. Berger, Frank L. Schadt, III
  • Patent number: 6974657
    Abstract: A fluorine-containing polymer prepared from at least a spacer group selected from the group consisting of ethylene, alpha-olefins, 1,1?-disubstituted olefins, vinyl alcohols, vinyl ethers, and 1,3-dienes; and a norbornyl radical containing a functional group containing the structure: —C(Rf)(Rf?)Orb wherein Rf and Rf? are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is an integer ranging from 2 to about 10 and Rb is a hydrogen atom or an acid- or base-labile protecting group; r is an integer ranging from 0-4. The fluorine-containing polymer has an absorption coefficient of less than 4.0 mm?1 at a wavelength of 157 nm. These polymers are useful in photoresist compositions for microlithography. They exhibit high transparency at this short wavelength and also possess other key properties, including good plasma etch resistance and adhesive properties.
    Type: Grant
    Filed: October 16, 2001
    Date of Patent: December 13, 2005
    Assignee: E. I. du Pont de Nemours and Company
    Inventors: Larry L. Berger, Michael Karl Crawford, Jerald Feldman, Lynda Kaye Johnson, Frank Leonard Schadt, III, Fredrick Claus Zumsteg, Jr.
  • Publication number: 20040137360
    Abstract: A photoresist composition having (A) at least two polymers selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf′)OH wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10;(d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole) or CX2═CY2 where X=F or CF3 and Y=H or amorphous vinyl copolymers of perfluoro(2,2-dimethyl-1,3-dioxole) and CX2═CY2; and (e) nitrile/fluoroalcohol-containing polymers prepared from substituted or un
    Type: Application
    Filed: April 9, 2003
    Publication date: July 15, 2004
    Inventors: Larry L Berger, Frank L Schadt
  • Publication number: 20040038151
    Abstract: A photoresist element comprising a substrate; an etch resistant layer; and at least one photoresist layer prepared from a photoresist composition comprising a polymer selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf′)OH, wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10; (d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole) or CX2═CY2 where X═F or CF3 and Y═—H or amorphous vinyl copolymers of perfluoro(2,2-dimethyl
    Type: Application
    Filed: April 9, 2003
    Publication date: February 26, 2004
    Inventors: Larry L Berger, Frank L Schadt
  • Publication number: 20040033436
    Abstract: A fluorine-containing polymer prepared from at least a spacer group selected from the group consisting of ethylene, alpha-olefins, 1,1′-disubstituted olefins, vinyl alcohols, vinyl ethers, and 1,3-dienes; and a norbornyl radical containing a functional group containing the structure: —C(Rf)(Rf′)Orb wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is an integer ranging from 2 to about 10 and Rb is a hydrogen atom or an acid-base-labile protecting group; r is an integer ranging from 0-4. The fluorine-containing polymer has an absorption coefficient of less than 4.0 mm−1 at a wavelength of 157 nm. These polymers are useful in photoresist compositions for microlithography. They exhibit high transparency at this short wavelength and also possess other key properties, including good plasma etch resistance and adhesive properties.
    Type: Application
    Filed: March 18, 2003
    Publication date: February 19, 2004
    Inventors: Larry L. Berger, Michael Karl Crawford, Jerald Feldman, Lynda Kaye Johnson, Frank L. Schadt III, Fredrick Claus Zumsteg Jr
  • Publication number: 20040013971
    Abstract: An element having a support, and at least an antireflective layer; wherein the antireflective layer is prepared from a composition having a polymer selected from the group consisting of (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure:—C(Rf)(Rf′)OH wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10; (d) amorphous vinyl homopolymers of perfluoro-2,2-dimethyl-1,3-dioxole or CX2═CY2, where X is —F, or —CF3 and Y is H, or amorphous vinyl copolymers of perfluoro-2,2-dimethyl-1,3-dioxole and
    Type: Application
    Filed: April 8, 2003
    Publication date: January 22, 2004
    Inventors: Larry L Berger, Michael Karl Crawford, Roger Harquaill French, Robert Clayton Wheland, Frederick Claus Zumsteg
  • Publication number: 20040013709
    Abstract: The instant invention is directed to a protective covering for application on livestock feedstuffs to prevent spoilage of the feedstuffs that is also edible by livestock, and includes a nutritive starch source to provide a nutritive aggregate ingredient, a salt to promote stability in a protective solution, a non-protein nitrogen source to act as a surfactant, and cement to promote spraying application of the protective solution formed from the covering. The instant invention is directed to a protective covering that includes a dry mixture, to which a sufficient amount of water is added to form an aqueous solution. The dry mixture includes a nutritive starch source, a salt source, a non-protein nitrogen source such as urea, and cement. Water is added to the dry mixture, resulting in the instant protective solution. The protective solution is then applied to various target surfaces, which include typical livestock feedstuffs such as silage, hay and grain.
    Type: Application
    Filed: July 19, 2002
    Publication date: January 22, 2004
    Applicant: The Board of Trustees of the University of Illinois
    Inventor: Larry L. Berger
  • Patent number: 5238928
    Abstract: Methods for producing phenotypic female mammals intended for human or animal consumption despite androgen administration to obtain the benefits thereof, which methods include prenatally exposing said female mammals to androgen by administering to the mother an effectively constant amount of androgen sufficient to achieve and maintain a level of circulating androgen in the mother's bloodstream approximately equivalent to that of a normal adult male of the same species.
    Type: Grant
    Filed: October 10, 1991
    Date of Patent: August 24, 1993
    Assignee: Board of Trustees of the University of Illinois
    Inventors: Larry L. Berger, Darrel Kesler
  • Patent number: 4965086
    Abstract: A method is disclosed for treating a lignocellulosic substrate in order to imrpove its nutritive value wherein a plant substrate is treated with a sufficient amount of an alkaline material and hydrogen peroxide, or a compound capable of generating hydrogen peroxide, for a sufficient period of time and the reaction mass is extruded to produce a product having increased nutrient availability.
    Type: Grant
    Filed: January 4, 1988
    Date of Patent: October 23, 1990
    Assignee: Degussa Aktiengesellschaft
    Inventors: Oswald Helmling, G. Arnold, H. Rzehak, George C. Fahey, Jr., Larry L. Berger, Neal R. Merchen, John Medina, Rudi Moerck