Patents by Inventor Larry L. Berger
Larry L. Berger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7205086Abstract: A photoresist element comprising a substrate; an etch resistant layer; and at least one photoresist layer prepared from a photoresist composition comprising a polymer selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf?)OH, wherein Rf and Rf? are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10; (d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole) or CX2?CY2 where X?F or CF3 and Y?—H or amorphous vinyl copolymers of perfluoro(2,2-dimethyl-1,3-dioxole) and CX2?CY2; and (e) nitrType: GrantFiled: November 26, 2001Date of Patent: April 17, 2007Assignee: E. I. du Pont de Nemours and CompanyInventors: Larry L. Berger, Frank L. Schadt, III
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Patent number: 7108953Abstract: The invention relates to a photoresist composition comprising a polymeric binder; a photoactive component; and at least one dissolution inhibitor comprising a paraffinic or cycloparaffinic compound containing at least one functional group having the structure —C(Rf)(Rf?)OR wherein Rf and Rf? are the same or different fluoroalkyl groups of from one or taken together are (CF2)a wherein a is an integer ranging from 2 to about 10 and R is a hydrogen atom or an acid labile protecting group. Typically, the dissolution inhibitor has an absorption coefficient of less than about 4.0 ?m at a wavelength of 157 nm.Type: GrantFiled: October 12, 2001Date of Patent: September 19, 2006Assignee: E. I. du Pont de Nemours and CompanyInventors: Larry L. Berger, Jerald Feldman, Viacheslav Alexandrovich Petrov, Frank L. Schadt, III, Andrew E. Feiring, Fredrick Claus Zumsteg, Jr.
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Patent number: 7045268Abstract: A photoresist composition having (A) at least two polymers selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf?)OH wherein Rf and Rf? are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10;(d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole or CX2?CY2 where X=F or CF3 and Y=H or amorphous vinyl copolymers of perfluoro(2,2-dimethyl-1,3-dioxole) and CX2?CY2; and (e) nitrile/fluoroalcohol-containing polymers prepared from substituted or unsubstituted vinyl ethers; and (B) at leastType: GrantFiled: November 21, 2001Date of Patent: May 16, 2006Assignee: E.I. du Pont de Nemours and CompanyInventors: Larry L. Berger, Frank L. Schadt, III
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Patent number: 6974657Abstract: A fluorine-containing polymer prepared from at least a spacer group selected from the group consisting of ethylene, alpha-olefins, 1,1?-disubstituted olefins, vinyl alcohols, vinyl ethers, and 1,3-dienes; and a norbornyl radical containing a functional group containing the structure: —C(Rf)(Rf?)Orb wherein Rf and Rf? are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is an integer ranging from 2 to about 10 and Rb is a hydrogen atom or an acid- or base-labile protecting group; r is an integer ranging from 0-4. The fluorine-containing polymer has an absorption coefficient of less than 4.0 mm?1 at a wavelength of 157 nm. These polymers are useful in photoresist compositions for microlithography. They exhibit high transparency at this short wavelength and also possess other key properties, including good plasma etch resistance and adhesive properties.Type: GrantFiled: October 16, 2001Date of Patent: December 13, 2005Assignee: E. I. du Pont de Nemours and CompanyInventors: Larry L. Berger, Michael Karl Crawford, Jerald Feldman, Lynda Kaye Johnson, Frank Leonard Schadt, III, Fredrick Claus Zumsteg, Jr.
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Publication number: 20040137360Abstract: A photoresist composition having (A) at least two polymers selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf′)OH wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10;(d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole) or CX2═CY2 where X=F or CF3 and Y=H or amorphous vinyl copolymers of perfluoro(2,2-dimethyl-1,3-dioxole) and CX2═CY2; and (e) nitrile/fluoroalcohol-containing polymers prepared from substituted or unType: ApplicationFiled: April 9, 2003Publication date: July 15, 2004Inventors: Larry L Berger, Frank L Schadt
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Publication number: 20040038151Abstract: A photoresist element comprising a substrate; an etch resistant layer; and at least one photoresist layer prepared from a photoresist composition comprising a polymer selected from the group consisting of: (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure: —C(Rf)(Rf′)OH, wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10; (d) amorphous vinyl homopolymers of perfluoro(2,2-dimethyl-1,3-dioxole) or CX2═CY2 where X═F or CF3 and Y═—H or amorphous vinyl copolymers of perfluoro(2,2-dimethylType: ApplicationFiled: April 9, 2003Publication date: February 26, 2004Inventors: Larry L Berger, Frank L Schadt
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Publication number: 20040033436Abstract: A fluorine-containing polymer prepared from at least a spacer group selected from the group consisting of ethylene, alpha-olefins, 1,1′-disubstituted olefins, vinyl alcohols, vinyl ethers, and 1,3-dienes; and a norbornyl radical containing a functional group containing the structure: —C(Rf)(Rf′)Orb wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is an integer ranging from 2 to about 10 and Rb is a hydrogen atom or an acid-base-labile protecting group; r is an integer ranging from 0-4. The fluorine-containing polymer has an absorption coefficient of less than 4.0 mm−1 at a wavelength of 157 nm. These polymers are useful in photoresist compositions for microlithography. They exhibit high transparency at this short wavelength and also possess other key properties, including good plasma etch resistance and adhesive properties.Type: ApplicationFiled: March 18, 2003Publication date: February 19, 2004Inventors: Larry L. Berger, Michael Karl Crawford, Jerald Feldman, Lynda Kaye Johnson, Frank L. Schadt III, Fredrick Claus Zumsteg Jr
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Publication number: 20040013971Abstract: An element having a support, and at least an antireflective layer; wherein the antireflective layer is prepared from a composition having a polymer selected from the group consisting of (a) a fluorine-containing copolymer comprising a repeat unit derived from at least one ethylenically unsaturated compound characterized in that at least one ethylenically unsaturated compound is polycyclic; (b) a branched polymer containing protected acid groups, said polymer comprising one or more branch segment(s) chemically linked along a linear backbone segment; (c) fluoropolymers having at least one fluoroalcohol group having the structure:—C(Rf)(Rf′)OH wherein Rf and Rf′ are the same or different fluoroalkyl groups of from 1 to about 10 carbon atoms or taken together are (CF2)n wherein n is 2 to 10; (d) amorphous vinyl homopolymers of perfluoro-2,2-dimethyl-1,3-dioxole or CX2═CY2, where X is —F, or —CF3 and Y is H, or amorphous vinyl copolymers of perfluoro-2,2-dimethyl-1,3-dioxole andType: ApplicationFiled: April 8, 2003Publication date: January 22, 2004Inventors: Larry L Berger, Michael Karl Crawford, Roger Harquaill French, Robert Clayton Wheland, Frederick Claus Zumsteg
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Publication number: 20040013709Abstract: The instant invention is directed to a protective covering for application on livestock feedstuffs to prevent spoilage of the feedstuffs that is also edible by livestock, and includes a nutritive starch source to provide a nutritive aggregate ingredient, a salt to promote stability in a protective solution, a non-protein nitrogen source to act as a surfactant, and cement to promote spraying application of the protective solution formed from the covering. The instant invention is directed to a protective covering that includes a dry mixture, to which a sufficient amount of water is added to form an aqueous solution. The dry mixture includes a nutritive starch source, a salt source, a non-protein nitrogen source such as urea, and cement. Water is added to the dry mixture, resulting in the instant protective solution. The protective solution is then applied to various target surfaces, which include typical livestock feedstuffs such as silage, hay and grain.Type: ApplicationFiled: July 19, 2002Publication date: January 22, 2004Applicant: The Board of Trustees of the University of IllinoisInventor: Larry L. Berger
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Patent number: 5238928Abstract: Methods for producing phenotypic female mammals intended for human or animal consumption despite androgen administration to obtain the benefits thereof, which methods include prenatally exposing said female mammals to androgen by administering to the mother an effectively constant amount of androgen sufficient to achieve and maintain a level of circulating androgen in the mother's bloodstream approximately equivalent to that of a normal adult male of the same species.Type: GrantFiled: October 10, 1991Date of Patent: August 24, 1993Assignee: Board of Trustees of the University of IllinoisInventors: Larry L. Berger, Darrel Kesler
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Patent number: 4965086Abstract: A method is disclosed for treating a lignocellulosic substrate in order to imrpove its nutritive value wherein a plant substrate is treated with a sufficient amount of an alkaline material and hydrogen peroxide, or a compound capable of generating hydrogen peroxide, for a sufficient period of time and the reaction mass is extruded to produce a product having increased nutrient availability.Type: GrantFiled: January 4, 1988Date of Patent: October 23, 1990Assignee: Degussa AktiengesellschaftInventors: Oswald Helmling, G. Arnold, H. Rzehak, George C. Fahey, Jr., Larry L. Berger, Neal R. Merchen, John Medina, Rudi Moerck