Abstract: Embodiments of the present disclosure provide a plasma processing system, comprising: a transfer chamber, the transfer chamber including a plurality of sidewalls, each sidewall being connected with a plurality of process chambers; each process chamber including a base therein, the base including a central point; wherein at least two process chambers connected to a same sidewall form one process chamber group, wherein a first distance is provided between the central points of two bases in a first process chamber group, and a second distance is provided between the central points of two bases in a second process chamber group, the first distance being greater than the second distance; and the transfer chamber comprises a mechanical transfer device; a rotating pedestal includes two independently movable robot arms thereon, the two robot arms; and the two robot arms both include a plurality of rotating shafts and a plurality of rotating arms, wherein a remote rotating arm of each robot arm further includes an end

Abstract: A method, computer program product, and computer system for determining, by a computing device, a weight of an indirect block page. The weight of the indirect block page may be compared to a threshold. it may be determined that the weight of the indirect block page is greater than the threshold. A copy of the indirect block page may be created as a backup page based upon, at least in part, determining that the weight of the indirect block page is greater than the threshold.

Abstract: A method, computer program product, and computer system for determining, by a computing device, a weight of an indirect block page. The weight of the indirect block page may be compared to a threshold. It may be determined that the weight of the indirect block page is greater than the threshold. A copy of the indirect block page may be created as a backup page based upon, at least in part, determining that the weight of the indirect block page is greater than the threshold.

Abstract: Embodiments of the present disclosure provide a plasma processing system, comprising: a transfer chamber, the transfer chamber including a plurality of sidewalls, each sidewall being connected with a plurality of process chambers; each process chamber including a base therein, the base including a central point; wherein at least two process chambers connected to a same sidewall form one process chamber group, wherein a first distance is provided between the central points of two bases in a first process chamber group, and a second distance is provided between the central points of two bases in a second process chamber group, the first distance being greater than the second distance; and the transfer chamber comprises a mechanical transfer device; a rotating pedestal includes two independently movable robot arms thereon, the two robot arms; and the two robot arms both include a plurality of rotating shafts and a plurality of rotating arms, wherein a remote rotating arm of each robot arm further includes an end

Abstract: Integrated circuits have expanded a set of custom registers and a read mechanism for control registers. One embodiment includes a circuit having a first set of registers; a second set of registers to be written via one or more write operations addressed to one or more registers of the first set; and a read controller coupled with the first and second sets of registers, the read controller to selectively output a portion of data stored in the first and second sets of registers based on data stored in one or more registers of the second set. In one embodiment, the circuit further includes a logic block; and a multiplexer to select from an output of the logic block and an output of the read controller as an output of the circuit based on the data stored in the one or more registers of the second set.

Abstract: Integrated circuits have expanded a set of custom registers and a read mechanism for control registers. One embodiment includes a circuit having a first set of registers; a second set of registers to be written via one or more write operations addressed to one or more registers of the first set; and a read controller coupled with the first and second sets of registers, the read controller to selectively output a portion of data stored in the first and second sets of registers based on data stored in one or more registers of the second set. In one embodiment, the circuit further includes a logic block; and a multiplexer to select from an output of the logic block and an output of the read controller as an output of the circuit based on the data stored in the one or more registers of the second set.