Patents by Inventor Larry Matheny

Larry Matheny has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature deposition of complex metal oxides (CMO) memory materials for non-volatile memory integrated circuits
    Patent number: 7063984
    Abstract: A memory fabrication apparatus includes a pair of targets arranged so as to be spaced apart from one another within a closed vacuum vessel, each target of said pair of targets having a sputtering surface facing the sputtering surface of the other target of said pair of targets; and substrate holder adapted to receive facing target sputtering a CMO material on an electrode.
    Type: Grant
    Filed: March 13, 2003
    Date of Patent: June 20, 2006
    Inventors: Makoto Nagashima, Darrell Rinerson, Steve K. Hsia, Larry Matheny
  • Low temperature deposition of complex metal oxides (CMO) memory materials for non-volatile memory integrated circuits
    Publication number: 20040180542
    Abstract: A method is disclosed to effectively achieve a low deposition temperature of CMO memory materials by facing target sputter deposition of the CMO memory material at relatively low temperatures that give an amorphous film. Subsequently, the CMO material can be melt and re-crystallized with a laser (laser annealing).
    Type: Application
    Filed: March 13, 2003
    Publication date: September 16, 2004
    Inventors: Makoto Nagashima, Darrell Rinerson, Steve K. Hsia, Larry Matheny