Patents by Inventor Larry Matthysse

Larry Matthysse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vaporizer for atomic layer deposition system
    Publication number: 20070042119
    Abstract: A multi-stage precursor vessel system for an atomic layer deposition (ALD) system in which a precursor is transferred from a first, low temperature reservoir chamber into a second (or subsequent) chamber at higher temperature, which second (or subsequent) chamber is used to create a highest possible vapor pressure of the precursor allowed by its temperature without decomposition in the timeframe of its residence therein.
    Type: Application
    Filed: February 10, 2006
    Publication date: February 22, 2007
    Inventors: Larry Matthysse, Xinye Liu, M. Karim, Thomas Seidel