Patents by Inventor Larry R. Fredrickson

Larry R. Fredrickson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for post-CMP conversion of a hydrophobic surface of a low-k dielectric layer to a hydrophilic surface
    Patent number: 6716771
    Abstract: A method of converting a hydrophobic surface of a dielectric layer to a hydrophilic surface is described. That method comprises forming on a substrate a dielectric layer that has a hydrophobic surface, then coupling a hydrophilic component to the surface of the dielectric layer. Also described is a method for making a semiconductor device that employs this technique after polishing a conductive layer, which may comprise copper.
    Type: Grant
    Filed: April 9, 2002
    Date of Patent: April 6, 2004
    Assignee: Intel Corporation
    Inventors: Mark F. Buehler, Larry R. Fredrickson
  • Method for post-CMP conversion of a hydrophobic surface of a low-k dielectric layer to a hydrophilic surface
    Publication number: 20030190816
    Abstract: A method of converting a hydrophobic surface of a dielectric layer to a hydrophilic surface is described. That method comprises forming on a substrate a dielectric layer that has a hydrophobic surface, then coupling a hydrophilic component to the surface of the dielectric layer. Also described is a method for making a semiconductor device that employs this technique after polishing a conductive layer, which may comprise copper.
    Type: Application
    Filed: April 9, 2002
    Publication date: October 9, 2003
    Inventors: Mark F. Buehler, Larry R. Fredrickson