Abstract: Disclosed are systems and methods for modifying a reticle. In general, inspection results from a plurality of wafers or prediction results from a lithographic model are used to individually decrease the dose or any other optical property at specific locations of the reticle. In one embodiment, any suitable optical property of the reticle is modified by an optical beam, such as a femto-second laser, at specific locations on the reticle so as to widen the process window for such optical property. Examples of optical properties include dose, phase, illumination angle, and birefringence. Techniques for adjusting optical properties at specific locations on a reticle using an optical beam may be practiced for other purposes besides widening the process window.

Abstract: A data storage medium having a pattern representing data bits arranged in a plurality of interlocked triangularly shaped tracks. The medium may be a prerecorded optical storage material having a set of optically contrasting marks arranged in the tracks. The track width increases from a start point to an end point at a constant rate that depends on the maximum allowable angle of skew. The medium, which can be prerecorded with the pattern using exposure to actinic radiation through a like-patterned master, can have either a card, tape or drum format.

Abstract: A data logger which incorporates a laser diode and focusing optics for logging data pits in optical recording media. The focusing optics may be attached to a spring assembly and caused to oscillate by electromagnetic or mechanical means. As the optical elements oscillate, the focused beam dithers above and below the surface of the recording media. When the laser beam focal region is in the plane of the recording surface a pit or deformation is formed in the surface. Relative motion is provided between the recording surface and the laser beam spot for further writing on the recording surface.