Patents by Inventor Larry Tran

Larry Tran has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for adaptive cleaning of a high-vacuum chamber
    Patent number: 12706285
    Abstract: A system and a method for an adaptive plasma-cleaning process for a reaction chamber allow continual monitoring by a residual gas analyzer, while active plasma-cleaning is carried out in the reaction chamber. The system includes a valve system and a pump system that allow the residual gas analyzer to perform continual monitoring at a favorable pressure condition that is independent of the active plasma-cleaning process.
    Type: Grant
    Filed: September 13, 2024
    Date of Patent: August 11, 2026
    Assignee: IBSS Group
    Inventors: Larry Tran, Vince Carlino, George Naugle
  • SYSTEM AND METHOD FOR ADAPTIVE CLEANING OF A HIGH-VACUUM CHAMBER
    Publication number: 20260081122
    Abstract: A system and a method for an adaptive plasma-cleaning process for a reaction chamber allow continual monitoring by a residual gas analyzer, while active plasma-cleaning is carried out in the reaction chamber. The system includes a valve system and a pump system that allow the residual gas analyzer to perform continual monitoring at a favorable pressure condition that is independent of the active plasma-cleaning process.
    Type: Application
    Filed: September 13, 2024
    Publication date: March 19, 2026
    Inventors: Larry Tran, Vince Carlino, George Naugle