Patents by Inventor Lars-Bo Tker

Lars-Bo Tker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for oxidation of silicon substrate
    Publication number: 20040132317
    Abstract: Method for oxidation of a silicon substrate under ultrahigh vacuum base conditions, wherein the substrate undergoes a number of oxidation cycles with exposure to oxygen and heat treatment for converting the adsorbed oxygen into silicon oxide.
    Type: Application
    Filed: March 3, 2004
    Publication date: July 8, 2004
    Inventors: Per Morgen, Kjeld Pedersen, Lars-Bo Tker, Thomas Jensen, Flemming K Dam, Soren V Hoffmann