Patents by Inventor Lars MÜLLER-MESKAMP

Lars MÜLLER-MESKAMP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250113567
    Abstract: A lateral high voltage semiconductor device includes a semiconductor substrate with a frontside and a semiconductor element. The semiconductor element includes: a first semiconductor region of a first conductivity type formed within the semiconductor substrate; a second semiconductor region formed within the semiconductor substrate and spaced apart from the first semiconductor region in a first lateral direction parallel to the frontside; and an extension region adjoining the second semiconductor region. The semiconductor device is configured to control a load current between the first and second semiconductor regions. The extension region extends along the frontside of the semiconductor substrate and includes at least one mesa protruding at the frontside of the semiconductor substrate.
    Type: Application
    Filed: September 26, 2024
    Publication date: April 3, 2025
    Inventors: Lars Müller-Meskamp, Ralf Rudolf, Franz Hirler, Fabian Geisenhof, Tom Peterhänsel, Annett Winzer, Dirk Priefert, Thomas Künzig, Felix Simon Winterer, Dirk Manger
  • Publication number: 20250107276
    Abstract: A semiconductor device includes: a silicon layer having a thickness in a range of 2 ?m to 200 ?m between a frontside and a backside of the silicon layer; a first device region and a second device region laterally isolated from one another in the silicon layer by an isolation structure that extends from the frontside to the backside of the silicon layer; a first insulation layer on the frontside of the silicon layer; a first patterned metallization on the first insulation layer; a second insulation layer on the backside of the silicon layer; and a second patterned metallization on the second insulation layer. The first patterned metallization provides lateral electrical routing along the frontside of the silicon layer. The second patterned metallization provides lateral electrical routing along the backside of the silicon layer. Additional embodiments of semiconductor devices and methods of producing the semiconductor devices are also described.
    Type: Application
    Filed: September 23, 2024
    Publication date: March 27, 2025
    Inventors: Annett Winzer, Lars Müller-Meskamp, Tom Peterhänsel
  • Publication number: 20230238459
    Abstract: A semiconductor device includes a semiconductor layer, an electronic element and laterally separated trench isolation structures. The semiconductor layer includes an element region having an inner region, an outer region on opposite sides of the inner region, and a transition region that laterally separates the inner region and the outer region. The electronic element includes a first doped region formed in the inner region and a second doped region formed in the outer region. The trench isolation structures are formed at least in the transition region. Each trench isolation structure extends from a first surface of the semiconductor layer into the semiconductor layer.
    Type: Application
    Filed: January 20, 2023
    Publication date: July 27, 2023
    Inventors: Lars Müller-Meskamp, Ralf Rudolf, Annett Winzer, Christian Schippel, Thomas Künzig, Dirk Priefert
  • Publication number: 20230140348
    Abstract: A semiconductor device includes a semiconductor layer with an inner portion, an outer portion laterally surrounding the inner portion, and a transition portion laterally surrounding the inner portion and separating the inner portion and the outer portion. A first electric element includes a first doped region formed in the inner portion and a second doped region formed in the outer portion. The first electric element is configured to at least temporarily block a voltage applied between the first doped region and the second doped region. A trench isolation structure extends from a first surface into the semiconductor layer and segments at least one of the inner portion, the transition portion, and the outer portion.
    Type: Application
    Filed: October 21, 2022
    Publication date: May 4, 2023
    Inventors: Lars Müller-Meskamp, Ralf Rudolf, Dirk Priefert, Annett Winzer, Thomas Künzig, Christian Schippel
  • Patent number: 10727251
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to rounded shaped transistors and methods of manufacture. The structure includes a gate structure composed of a metal electrode and a rounded ferroelectric material which overlaps an active area in a width direction into an isolation region.
    Type: Grant
    Filed: December 3, 2018
    Date of Patent: July 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Stefan Dünkel, Johannes Müller, Lars Müller-Meskamp
  • Publication number: 20200176456
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to rounded shaped transistors and methods of manufacture. The structure includes a gate structure composed of a metal electrode and a rounded ferroelectric material which overlaps an active area in a width direction into an isolation region.
    Type: Application
    Filed: December 3, 2018
    Publication date: June 4, 2020
    Inventors: Stefan DÜNKEL, Johannes MÜLLER, Lars MÜLLER-MESKAMP
  • Patent number: 10636876
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to devices with channel extension regions and methods of manufacture. The structure includes: a gate structure comprising source and drain regions; and a channel below the gate structure, the channel comprising: a first channel region, adjacent to the source region; and a second channel region, adjacent to the drain region and comprising a lower threshold voltage than the first channel region.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Lars Müller-Meskamp, Luca Pirro, Edward J. Nowak
  • Publication number: 20200035788
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to devices with channel extension regions and methods of manufacture. The structure includes: a gate structure comprising source and drain regions; and a channel below the gate structure, the channel comprising: a first channel region, adjacent to the source region; and a second channel region, adjacent to the drain region and comprising a lower threshold voltage than the first channel region.
    Type: Application
    Filed: July 26, 2018
    Publication date: January 30, 2020
    Inventors: Lars MÜLLER-MESKAMP, Luca PIRRO, Edward J. NOWAK