Patents by Inventor Lars MÜLLER-MESKAMP

Lars MÜLLER-MESKAMP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240363699
    Abstract: A semiconductor device includes: a semiconductor substrate having a first main surface and a second main surface opposite the first main surface; and a trench structure extending into the semiconductor substrate from the first main surface. The trench structure includes: an upper section extending into the semiconductor substrate from the first main surface; a lower section at an opposite end of the trench structure as the upper section; a first intermediary section between the upper section and the lower section; a field plate in the upper section and dielectrically insulated from the semiconductor substrate; and a first dielectric material completely filling the lower section. The lower section, the upper section, and the first intermediary section have different geometries and/or different dielectric materials. Methods of producing the semiconductor device are also described.
    Type: Application
    Filed: April 27, 2023
    Publication date: October 31, 2024
    Inventors: Annett Winzer, Lars Mueller-Meskamp, Tom Peterhaensel, Fabian Geisenhof, Torsten Helm, Dirk Manger
  • Publication number: 20240363700
    Abstract: A semiconductor device includes: a silicon layer having an electrically insulated backside and a thickness in a range of 10 ?m to 200 ?m between a frontside of the silicon layer and the electrically insulated backside; a high voltage region and a low voltage region formed in the silicon layer and laterally spaced apart from one another; and a first field plate structure extending from the frontside into the silicon layer. The first field plate structure includes a field plate laterally separated from the silicon layer by a dielectric material and/or a pn junction.
    Type: Application
    Filed: April 28, 2023
    Publication date: October 31, 2024
    Inventors: Lars Mueller-Meskamp, Ralf Rudolf, Anton Mauder, Annett Winzer, Dirk Priefert, Christian Schippel, Thomas Kuenzig
  • Publication number: 20240290882
    Abstract: A semiconductor device includes: a silicon layer having a frontside and an electrically insulated backside; a first trench extending through the silicon layer from the frontside to the electrically insulated backside and laterally isolating a first region of the silicon layer; an electrically conductive material in the first trench; a dielectric material separating the electrically conductive material from silicon material of the silicon layer; and a plurality of silicon plugs laterally surrounded by the dielectric material and dividing the electrically conductive material into a plurality of separate segments in the first trench. Additional embodiments of semiconductor devices and methods for manufacturing the semiconductor devices are also described.
    Type: Application
    Filed: February 23, 2023
    Publication date: August 29, 2024
    Inventors: Annett Winzer, Lars Mueller-Meskamp, Ralf Rudolf, Tom Peterhaensel, Birgit von Ehrenwall, Frido Erler, Dirk Manger
  • Publication number: 20230411060
    Abstract: A semiconductor die includes: a semiconductor substrate; a transmitter or receiver circuit in the semiconductor substrate; a multi-layer stack on the semiconductor substrate, the multi-layer stack including a plurality of metallization layers separated from one another by an interlayer dielectric; and a transformer in the multi-layer stack and electrically coupled to the transmitter or receiver circuit. The transformer includes a first winding formed in a first metallization layer of the plurality of metallization layers and a second winding formed in a second metallization layer of the plurality of metallization layers. The first winding and the second winding are inductively coupled to one another. A magnetic material in the multi-layer stack is adjacent to at least part of the transformer.
    Type: Application
    Filed: June 20, 2022
    Publication date: December 21, 2023
    Inventors: Annett Winzer, Michael Kirsch, Lars Mueller-Meskamp
  • Publication number: 20230238459
    Abstract: A semiconductor device includes a semiconductor layer, an electronic element and laterally separated trench isolation structures. The semiconductor layer includes an element region having an inner region, an outer region on opposite sides of the inner region, and a transition region that laterally separates the inner region and the outer region. The electronic element includes a first doped region formed in the inner region and a second doped region formed in the outer region. The trench isolation structures are formed at least in the transition region. Each trench isolation structure extends from a first surface of the semiconductor layer into the semiconductor layer.
    Type: Application
    Filed: January 20, 2023
    Publication date: July 27, 2023
    Inventors: Lars Müller-Meskamp, Ralf Rudolf, Annett Winzer, Christian Schippel, Thomas Künzig, Dirk Priefert
  • Publication number: 20230207451
    Abstract: A multi-voltage domain device includes a semiconductor layer including a first main surface, a second main surface arranged opposite to the first main surface, a first region including first circuitry that operates in a first voltage domain, a second region including second circuitry that operates in a second voltage domain different than the first voltage domain, and an isolation region that electrically isolates the first region from the second region in a lateral direction that extends parallel to the first and the second main surfaces. The isolation region includes at least one deep trench isolation barrier, each of which extends vertically from the first main surface to the second main surface. The multi-voltage domain device further includes at least one first capacitor configured to generate an electric field laterally across the isolation region between the first region and the second region.
    Type: Application
    Filed: February 21, 2023
    Publication date: June 29, 2023
    Inventors: Lars MUELLER-MESKAMP, Berthold ASTEGHER, Hermann GRUBER, Thomas Christian NEIDHART
  • Patent number: 11664307
    Abstract: A multi-voltage domain device includes a semiconductor layer including a first main surface, a second main surface arranged opposite to the first main surface, a first region including first circuity that operates in a first voltage domain, a second region including second circuity that operates in a second voltage domain different than the first voltage domain, and an isolation region that electrically isolates the first region from the second region in a lateral direction that extends parallel to the first and the second main surfaces. The isolation region includes at least one deep trench isolation barrier, each of which extends vertically from the first main surface to the second main surface. The multi-voltage domain device further includes at least one first capacitor configured to generate an electric field laterally across the isolation region between the first region and the second region.
    Type: Grant
    Filed: November 3, 2021
    Date of Patent: May 30, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Lars Mueller-Meskamp, Berthold Astegher, Hermann Gruber, Thomas Christian Neidhart
  • Publication number: 20230140348
    Abstract: A semiconductor device includes a semiconductor layer with an inner portion, an outer portion laterally surrounding the inner portion, and a transition portion laterally surrounding the inner portion and separating the inner portion and the outer portion. A first electric element includes a first doped region formed in the inner portion and a second doped region formed in the outer portion. The first electric element is configured to at least temporarily block a voltage applied between the first doped region and the second doped region. A trench isolation structure extends from a first surface into the semiconductor layer and segments at least one of the inner portion, the transition portion, and the outer portion.
    Type: Application
    Filed: October 21, 2022
    Publication date: May 4, 2023
    Inventors: Lars Müller-Meskamp, Ralf Rudolf, Dirk Priefert, Annett Winzer, Thomas Künzig, Christian Schippel
  • Patent number: 11398555
    Abstract: One illustrative device disclosed herein includes a gate structure positioned above an active semiconductor layer of an SOI substrate and a counter-doped back-gate region positioned in the doped base semiconductor substrate of the SOI substrate. In this particular embodiment, the device also includes a counter-doped back-gate contact region positioned in the base semiconductor substrate, wherein the counter-doped back-gate region and the counter-doped back-gate contact region are doped with a dopant type that is opposite the dopant type in the base semiconductor substrate. In this illustrative example, the counter-doped back-gate region and the counter-doped back-gate contact region are laterally separated from one another by a portion of the doped base semiconductor substrate. The device also includes a conductive back-gate contact structure that is conductively coupled to the counter-doped back-gate contact region.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: July 26, 2022
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Lars Mueller-Meskamp, Luca Pirro
  • Patent number: 11355719
    Abstract: An optoelectronic component on a substrate includes a first and a second electrode. The first electrode is arranged on the substrate and the second electrode forms a counter electrode. At least one photoactive layer system is arranged between these electrodes. The at least one photoactive layer system including at least one donor-acceptor system having organic materials.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: June 7, 2022
    Assignee: HELIATEK GMBH
    Inventors: Martin Pfeiffer, Christian Uhrich, Ulrike Bewersdorff-Sarlette, Jan Meiss, Karl Leo, Moritz Riede, Sylvio Schubert, Lars Mueller-Meskamp
  • Publication number: 20220059453
    Abstract: A multi-voltage domain device includes a semiconductor layer including a first main surface, a second main surface arranged opposite to the first main surface, a first region including first circuity that operates in a first voltage domain, a second region including second circuity that operates in a second voltage domain different than the first voltage domain, and an isolation region that electrically isolates the first region from the second region in a lateral direction that extends parallel to the first and the second main surfaces. The isolation region includes at least one deep trench isolation barrier, each of which extends vertically from the first main surface to the second main surface. The multi-voltage domain device further includes at least one first capacitor configured to generate an electric field laterally across the isolation region between the first region and the second region.
    Type: Application
    Filed: November 3, 2021
    Publication date: February 24, 2022
    Applicant: Infineon Technologies Austria AG
    Inventors: Lars MUELLER-MESKAMP, Berthold ASTEGHER, Hermann GRUBER, Thomas Christian NEIDHART
  • Patent number: 11183452
    Abstract: A multi-voltage domain device includes a semiconductor layer including a first main surface, a second main surface arranged opposite to the first main surface, a first region including first circuitry that operates in a first voltage domain, a second region including second circuitry that operates in a second voltage domain different than the first voltage domain, and an isolation region that electrically isolates the first region from the second region in a lateral direction that extends parallel to the first and the second main surfaces. The isolation region includes at least one deep trench isolation barrier, each of which extends vertically from the first main surface to the second main surface. The multi-voltage domain device further includes at least one first capacitor configured to generate an electric field laterally across the isolation region between the first region and the second region.
    Type: Grant
    Filed: August 12, 2020
    Date of Patent: November 23, 2021
    Inventors: Lars Mueller-Meskamp, Berthold Astegher, Hermann Gruber, Thomas Christian Neidhart
  • Publication number: 20210043733
    Abstract: One illustrative device disclosed herein includes a gate structure positioned above an active semiconductor layer of an SOI substrate and a counter-doped back-gate region positioned in the doped base semiconductor substrate of the SOI substrate. In this particular embodiment, the device also includes a counter-doped back-gate contact region positioned in the base semiconductor substrate, wherein the counter-doped back-gate region and the counter-doped back-gate contact region are doped with a dopant type that is opposite the dopant type in the base semiconductor substrate. In this illustrative example, the counter-doped back-gate region and the counter-doped back-gate contact region are laterally separated from one another by a portion of the doped base semiconductor substrate. The device also includes a conductive back-gate contact structure that is conductively coupled to the counter-doped back-gate contact region.
    Type: Application
    Filed: August 8, 2019
    Publication date: February 11, 2021
    Inventors: Lars Mueller-Meskamp, Luca Pirro
  • Patent number: 10727251
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to rounded shaped transistors and methods of manufacture. The structure includes a gate structure composed of a metal electrode and a rounded ferroelectric material which overlaps an active area in a width direction into an isolation region.
    Type: Grant
    Filed: December 3, 2018
    Date of Patent: July 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Stefan Dünkel, Johannes Müller, Lars Müller-Meskamp
  • Publication number: 20200176456
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to rounded shaped transistors and methods of manufacture. The structure includes a gate structure composed of a metal electrode and a rounded ferroelectric material which overlaps an active area in a width direction into an isolation region.
    Type: Application
    Filed: December 3, 2018
    Publication date: June 4, 2020
    Inventors: Stefan DÜNKEL, Johannes MÜLLER, Lars MÜLLER-MESKAMP
  • Patent number: 10636876
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to devices with channel extension regions and methods of manufacture. The structure includes: a gate structure comprising source and drain regions; and a channel below the gate structure, the channel comprising: a first channel region, adjacent to the source region; and a second channel region, adjacent to the drain region and comprising a lower threshold voltage than the first channel region.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Lars Müller-Meskamp, Luca Pirro, Edward J. Nowak
  • Patent number: 10580863
    Abstract: In sophisticated semiconductor devices, the lateral electric field in fully depleted transistor elements operated at elevated supply voltages may be significantly reduced by establishing a laterally graded dopant profile at edge regions of the respective channel regions. In some illustrative embodiments to this end, one or more dopant species may be incorporated prior to completing the gate electrode structure.
    Type: Grant
    Filed: October 10, 2017
    Date of Patent: March 3, 2020
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Damien Angot, Alban Zaka, Tom Herrmann, Venkata Naga Ranjith Kuma Nelluri, Jan Hoentschel, Lars Mueller-Meskamp, Martin Gerhardt
  • Publication number: 20200035788
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to devices with channel extension regions and methods of manufacture. The structure includes: a gate structure comprising source and drain regions; and a channel below the gate structure, the channel comprising: a first channel region, adjacent to the source region; and a second channel region, adjacent to the drain region and comprising a lower threshold voltage than the first channel region.
    Type: Application
    Filed: July 26, 2018
    Publication date: January 30, 2020
    Inventors: Lars MÜLLER-MESKAMP, Luca PIRRO, Edward J. NOWAK
  • Patent number: 10388514
    Abstract: In semiconductor devices, high-k dielectric materials may be formed on the basis of engineered surface conditions, thereby contributing to superior uniformity of the resulting characteristics. In some illustrative embodiments, the dielectric material may be stabilized in a ferroelectric phase, wherein the previous surface modulation, which, in the illustrative embodiments may include the introduction of respective species, such as dopant species, thereby contributing to uniform ferroelectric characteristics. In some illustrative embodiments, the process strategy may be applied to a buried insulating layer of an SOI substrate.
    Type: Grant
    Filed: October 11, 2017
    Date of Patent: August 20, 2019
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Lars Mueller-Meskamp, Stefan Duenkel
  • Publication number: 20190108998
    Abstract: In semiconductor devices, high-k dielectric materials may be formed on the basis of engineered surface conditions, thereby contributing to superior uniformity of the resulting characteristics. In some illustrative embodiments, the dielectric material may be stabilized in a ferroelectric phase, wherein the previous surface modulation, which, in the illustrative embodiments may include the introduction of respective species, such as dopant species, thereby contributing to uniform ferroelectric characteristics. In some illustrative embodiments, the process strategy may be applied to a buried insulating layer of an SOI substrate.
    Type: Application
    Filed: October 11, 2017
    Publication date: April 11, 2019
    Inventors: Lars Mueller-Meskamp, Stefan Duenkel