Abstract: A method for fabricating low temperature vacuum-sealed bonds through the use of cold diffusion welding comprising the steps of depositing high adhesion layers on the working surfaces of details, depositing soft layers on working surfaces, and the mechanical attachment of the working surfaces under pressure at substantially low temperatures.

Abstract: In one aspect, the present invention provides a method for fabricating two layers separated by a gap comprising the steps of: (a) providing a first material; (b) treating the first material to reduce the number of available bonding centers; (c) placing a second material over the first material and allowing bonds to form between the two materials to form a composite; and (d) separating the composite so formed along the boundary of the two materials. In a further aspect, subsequent layers of material may be introduced to the composite by repeating steps (b) and (c) under conditions where adhesion between the subsequent layers is greater, smaller or substantially the same as the adhesion between the first and second material.