Patents by Inventor Lauren Wilson
Lauren Wilson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240094632Abstract: Precursor solutions for radiation patternable coatings are formed with an organic solvent and monoalkyl tin trialkoxides in which the water content of the solvent is adjusted to be within 10 percent of a selected value. Generally, the water content of the solvent is adjusted through water addition, although water removal can also be used. In some embodiments, the adjusted water content of the solvent can be from about 250 ppm by weight to about 10,000 ppm by weight. With the appropriate selection of ligands, the adjusted precursor solutions can be stable for at least about 42 days, and in some cases at least 8 months.Type: ApplicationFiled: November 28, 2023Publication date: March 21, 2024Inventors: Kai Jiang, Stephen T. Meyers, Lauren B. McQuade, Jeremy T. Anderson, Brian J. Cardineau, Benjamin L. Clark, Dominick Smiddy, Margaret Wilson-Moses
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Patent number: 11879683Abstract: A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.Type: GrantFiled: April 1, 2021Date of Patent: January 23, 2024Assignee: KLA CorporationInventors: Sherman Seelinger, Lauren Wilson
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Patent number: 11635700Abstract: A method for producing a protective buffer flow in an EUV light source and an EUV mask inspection apparatus are provided. The method includes directing light along a light path from the EUV light source toward a collector. A first buffer gas from a buffer gas injector is injected through a plurality of through holes in the collector. The first buffer gas is directed away from a surface of the collector. A second buffer gas is injected from a ring manifold arranged peripherally to the collector and arranged a first distance toward the light path in relation to the collector. The second buffer gas is directed away from the surface of the collector. The first distance corresponds to a distance from the collector where the first buffer gas merges into a single flow.Type: GrantFiled: March 23, 2021Date of Patent: April 25, 2023Inventors: Erel Milshtein, Alexander Bykanov, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher, Brian Ahr, Maksim Alexandrovich Deminskii, Leonid Borisovich Zvedenuk, Aleksandr Vladimirovich Lebedev, Andrey Evgenievich Stepanov
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Patent number: 11617256Abstract: A broadband light source includes a rotatable drum coated with plasma-forming target material, a rotational actuator configured to rotate the rotatable drum, and a rotary encoder connected to the rotatable drum. The broadband light source may include a linear actuator configured to axially translate the rotatable drum and linear encoder connected to the rotatable drum. The broadband light source includes a pulsed laser source configured to direct pulsed illumination to a set of spots on the material-coated portion of the rotatable drum for exciting the plasma-forming target material and emitting broadband light as the drum is actuated. The broadband light source includes a control system. The control system is configured to receive one or more rotational position indicators from the rotary indicator and control triggering of the laser source based on the one or more rotational position indicators from rotary encoder.Type: GrantFiled: December 30, 2020Date of Patent: March 28, 2023Assignee: KLA CorporationInventors: Jian Xu, Lauren Wilson
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Publication number: 20220260928Abstract: A method for producing a protective buffer flow in an EUV light source and an EUV mask inspection apparatus are provided. The method includes directing light along a light path from the EUV light source toward a collector. A first buffer gas from a buffer gas injector is injected through a plurality of through holes in the collector. The first buffer gas is directed away from a surface of the collector. A second buffer gas is injected from a ring manifold arranged peripherally to the collector and arranged a first distance toward the light path in relation to the collector. The second buffer gas is directed away from the surface of the collector. The first distance corresponds to a distance from the collector where the first buffer gas merges into a single flow.Type: ApplicationFiled: March 23, 2021Publication date: August 18, 2022Inventors: Erel Milshtein, Alexander Bykanov, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher, Brian Ahr, Maksim Alexandrovich Deminskii, Leonid Borisovich Zvedenuk, Aleksandr Vladimirovich Lebedev, Andrey Evgenievich Stepanov
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Publication number: 20220210901Abstract: A broadband light source includes a rotatable drum coated with plasma-forming target material, a rotational actuator configured to rotate the rotatable drum, and a rotary encoder connected to the rotatable drum. The broadband light source may include a linear actuator configured to axially translate the rotatable drum and linear encoder connected to the rotatable drum. The broadband light source includes a pulsed laser source configured to direct pulsed illumination to a set of spots on the material-coated portion of the rotatable drum for exciting the plasma-forming target material and emitting broadband light as the drum is actuated. The broadband light source includes a control system. The control system is configured to receive one or more rotational position indicators from the rotary indicator and control triggering of the laser source based on the one or more rotational position indicators from rotary encoder.Type: ApplicationFiled: December 30, 2020Publication date: June 30, 2022Inventors: Jian Xu, Lauren Wilson
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Publication number: 20210310717Abstract: A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.Type: ApplicationFiled: April 1, 2021Publication date: October 7, 2021Inventors: Sherman Seelinger, Lauren Wilson
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Patent number: 10522340Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.Type: GrantFiled: July 23, 2018Date of Patent: December 31, 2019Assignee: KLA-Tencor CorporationInventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
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Patent number: 10495287Abstract: A broadband illumination source is disclosed. The broadband illumination source may include a pump source configured to generate pump illumination. The broadband illumination also includes an active medium containing nanocrystals. The broadband illumination source includes pump illumination optics configured to direct pump illumination into the active medium. The active medium is configured to emit broadband illumination by down-converting a portion of the pump illumination via photoluminescence.Type: GrantFiled: January 3, 2018Date of Patent: December 3, 2019Assignee: KLA-Tencor CorporationInventors: Ilya Bezel, Lauren Wilson, Joshua Wittenberg, Matthew Derstine
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Patent number: 10283342Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.Type: GrantFiled: November 23, 2016Date of Patent: May 7, 2019Assignee: KLA-Tencor CorporationInventors: Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson, Joshua Wittenberg
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Patent number: 10257918Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.Type: GrantFiled: September 23, 2016Date of Patent: April 9, 2019Assignee: KLA-Tencor CorporationInventors: Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav, Ilya Bezel, Michael Navone, Anatoly Shchemelinin
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Publication number: 20180330937Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.Type: ApplicationFiled: July 23, 2018Publication date: November 15, 2018Inventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
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Patent number: 10032620Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.Type: GrantFiled: April 29, 2015Date of Patent: July 24, 2018Assignee: KLA-Tencor CorporationInventors: Lauren Wilson, Anant Chimmalgi, Matthew Panzer, Ilya Bezel
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Patent number: 9899205Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.Type: GrantFiled: July 29, 2016Date of Patent: February 20, 2018Assignee: KLA-Tencor CorporationInventors: Ilya Bezel, Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg, Aizaz Bhuiyan, Anatoly Shchemelinin, Anant Chimmalgi, Richard Solarz
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Publication number: 20170345639Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.Type: ApplicationFiled: July 29, 2016Publication date: November 30, 2017Inventors: Ilya Bezel, Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg, Aizaz Bhuiyan, Anatoly Shchemelinin, Anant Chimmalgi, Richard Solarz
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Patent number: 9721761Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.Type: GrantFiled: February 15, 2016Date of Patent: August 1, 2017Assignee: KLA-Tencor CorporationInventors: Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado
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Publication number: 20170164457Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.Type: ApplicationFiled: November 23, 2016Publication date: June 8, 2017Inventors: Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson, Joshua Wittenberg
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Patent number: 9615439Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.Type: GrantFiled: January 6, 2016Date of Patent: April 4, 2017Assignee: KLA-Tencor CorporationInventors: Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Richard Solarz, Lauren Wilson, Rahul Yadav, Joshua Wittenberg, Anant Chimmalgi, Xiumei Liu, Brooke Bruguier
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Publication number: 20170094765Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.Type: ApplicationFiled: September 23, 2016Publication date: March 30, 2017Inventors: Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav, Ilya Bezel, Michael Navone, Anatoly Shchemelinin
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Patent number: 9534848Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.Type: GrantFiled: August 26, 2013Date of Patent: January 3, 2017Assignee: KLA-Tencor CorporationInventors: Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner, Quang Giang, Lauren Wilson, Ken Gross, Ilya Bezel, Dan Scott, Younus Vora, Matthew Derstine, Cedric Lasfargues