Patents by Inventor Laurence C. Smith

Laurence C. Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH PERFORMANCE SEMICONDUCTOR GRADE DIMETHYLALUMINUM CHLORIDE
    Publication number: 20240124776
    Abstract: Novel high purity dimethylaluminium chloride compositions are provided that are suitable for semiconductor applications, such as atomic layer etch and aluminum ion implantation. The reduction or minimization of specified gaseous impurities allows the vapor phase of the DMAC to have purity levels of 99.9 mol % or higher to selectively etch various atomic layers with high selectivity and high etch precision at acceptable etch rates and 99 mol % or higher to ion implant aluminum ions without substantial implantation of C2H3 ions into a wafer device, thereby avoiding degradation or failure of the wafer device. Storage conditions are established that are conducive to maintaining the high purity levels required for such semiconductor applications.
    Type: Application
    Filed: June 13, 2023
    Publication date: April 18, 2024
    Inventors: Laurence E. Spurgeon, Ashwini K. Sinha, Douglas C. Heiderman, Stanley M. Smith, Oleg Byl
  • System for managing environmental audit information
    Patent number: 7051046
    Abstract: The present invention is directed to a system for managing environmental audit information which includes receiving environmental audit information, accessing a predetermined set of environmental audit protocols, associating the audit information with at least one of the environmental audit protocols to form at least one environmental audit record, and storing the environmental audit record. The system of the present invention may also restrict access to the audit record, such that a quality assurance reviewer may review said audit record and may designate the status of that review, but may not modify the contents of the audit record.
    Type: Grant
    Filed: August 1, 2001
    Date of Patent: May 23, 2006
    Assignee: Roy F. Weston, Inc.
    Inventors: Peter E. Virag, Laurence C. Smith
  • System for managing environmental audit information
    Publication number: 20030028544
    Abstract: The present invention is directed to a system for managing environmental audit information which includes receiving environmental audit information, accessing a predetermined set of environmental audit protocols, associating the audit information with at least one of the environmental audit protocols to form at least one environmental audit record, and storing the environmental audit record. The system of the present invention may also restrict access to the audit record, such that a quality assurance reviewer may review said audit record and may designate the status of that review, but may not modify the contents of the audit record.
    Type: Application
    Filed: August 1, 2001
    Publication date: February 6, 2003
    Applicant: Roy F. Weston, Inc.
    Inventors: Peter E. Virag, Laurence C. Smith