Patents by Inventor Laurence Hordon

Laurence Hordon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for aberration-insensitive electron beam imaging
    Patent number: 7405402
    Abstract: One embodiment relates to an electron beam apparatus for automated imaging of a substrate surface. An electron source is configured to emit electrons, and a gun lens is configured to focus the electrons emitted by the electron source so as to form an electron beam. A condenser lens system is configured to receive the electron beam and to reduce its numerical aperture to an ultra-low numerical aperture. An objective lens is configured to focus the ultra-low numerical aperture beam onto the substrate surface. Other embodiments are also disclosed.
    Type: Grant
    Filed: February 22, 2006
    Date of Patent: July 29, 2008
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Srinivas Vedula, Amir Azordegan, Laurence Hordon, Alan D. Brodie, Gian Francesco Lorusso, Takuji Tada