Patents by Inventor Laurence Schultz

Laurence Schultz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VERSATILE SYSTEM FOR CONDITIONING SLURRY IN CMP PROCESS
    Publication number: 20060276042
    Abstract: The present invention provides a system (100) for conditioning multi-component slurries utilized in chemical mechanical polishing (CMP) of semiconductor wafers (140). The system provides a first slurry component (108), and a second slurry component (120). A conditioning component (102) has first and second inlets, and an outlet operatively coupled to a dispensing system (138). First and second flow control components (116, 126) are operably intercoupled between the first and second inlets and the first and second slurry components, respectively. The system further provides a megasonic energy source (106), adapted to generate an energy field (118) across the conditioning component. A conveyance component (114) conducts the slurry components from the inlets through the energy field, and delivers a final mixture (136) of multi-component slurry to the outlet.
    Type: Application
    Filed: August 18, 2006
    Publication date: December 7, 2006
    Applicant: Texas Instruments Incorporated
    Inventors: David Stark, Laurence Schultz, Neal Murphy
  • Versatile system for conditioning slurry in CMP process
    Publication number: 20060026906
    Abstract: The present invention provides a system (100) for conditioning multi-component slurries utilized in chemical mechanical polishing (CMP) of semiconductor wafers (140). The system provides a first slurry component (108), and a second slurry component (120). A conditioning component (102) has first and second inlets, and an outlet operatively coupled to a dispensing system (138). First and second flow control components (116, 126) are operably intercoupled between the first and second inlets and the first and second slurry components, respectively. The system further provides a megasonic energy source (106), adapted to generate an energy field (118) across the conditioning component. A conveyance component (114) conducts the slurry components from the inlets through the energy field, and delivers a final mixture (136) of multi-component slurry to the outlet.
    Type: Application
    Filed: July 21, 2004
    Publication date: February 9, 2006
    Inventors: David Stark, Laurence Schultz, Neal Murphy