Patents by Inventor Laurent LECORDIER

Laurent LECORDIER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10316406
    Abstract: Methods of forming an ALD-inhibiting layer using a layer of SAM molecules include providing a metalized substrate having a metal M and an oxide layer of the metal M. A reduction gas that includes a metal Q is used to reduce the oxide layer of the metal M, leaving a layer of form of M+MQyOx atop the metal M. The SAM molecules are provided as a vapor and form an ALD-inhibiting SAM layer on the M+MQyOx layer. Methods of performing S-ALD using the ALD-inhibiting SAM layer are also disclosed.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: June 11, 2019
    Assignee: Ultratech, Inc.
    Inventor: Laurent Lecordier
  • Patent number: 10032569
    Abstract: An apparatus, system, and method are provided for a vertical two-terminal nanotube or microtube device configured to capture and generate energy, to store electrical energy, and to integrate these functions with power management circuitry. The vertical device can include a column disposed in a template material extending from one side of the template material to the other side of the template material. Further, the device can include a first material disposed within the column, a second material disposed within the column, and a third material disposed in the column. A variety of configurations, variations, and modifications are provided.
    Type: Grant
    Filed: December 15, 2014
    Date of Patent: July 24, 2018
    Assignee: UNIVERSITY OF MARYLAND, COLLEGE PARK
    Inventors: Gary W. Rubloff, Sang Bok Lee, Israel Perez, Laurent Lecordier, Parag Banerjee, Chanyuan Liu, Xinyi Chen, Eleanor Gillette
  • Publication number: 20170260629
    Abstract: A quartz crystal microbalance assembly includes a lid of a reactor chamber of an ALD system. A QCM crystal is disposed in a bottom section of a central cavity formed in the lid. A central portion of a front surface of the QCM crystal is exposed to an interior of the reactor chamber. A retainer arranged within the central cavity and above the QCM crystal presses the QCM crystal against a ledge in the lid to form a seal between the front surface of the QCM crystal and the ledge while also establishing electrical contact with the QCM crystal. A flange resides immediately adjacent a top surface of the lid and seals the central cavity while supporting electrical contact with the QCM crystal through the retainer. A transducer external to the reactor chamber and in electrical contact with the QCM crystal through a connector in the flange drives the QCM crystal.
    Type: Application
    Filed: February 17, 2017
    Publication date: September 14, 2017
    Applicant: Ultratech, Inc.
    Inventors: Laurent Lecordier, Michael Ruffo
  • Publication number: 20170114451
    Abstract: Methods of forming an ALD-inhibiting layer using a layer of SAM molecules include providing a metalized substrate having a metal M and an oxide layer of the metal M. A reduction gas that includes a metal Q is used to reduce the oxide layer of the metal M, leaving a layer of form of M+MQyOx atop the metal M. The SAM molecules are provided as a vapor and form an ALD-inhibiting SAM layer on the M+MQyOx layer. Methods of performing S-ALD using the ALD-inhibiting SAM layer are also disclosed.
    Type: Application
    Filed: October 17, 2016
    Publication date: April 27, 2017
    Applicant: Ultratech, Inc.
    Inventor: Laurent Lecordier
  • Publication number: 20150200058
    Abstract: An apparatus, system, and method are provided for a vertical two-terminal nanotube or microtube device configured to capture and generate energy, to store electrical energy, and to integrate these functions with power management circuitry. The vertical device can include a column disposed in a template material extending from one side of the template material to the other side of the template material. Further, the device can include a first material disposed within the column, a second material disposed within the column, and a third material disposed in the column. A variety of configurations, variations, and modifications are provided.
    Type: Application
    Filed: December 15, 2014
    Publication date: July 16, 2015
    Inventors: Gary W. RUBLOFF, Sang Bok LEE, Israel PEREZ, Laurent LECORDIER, Parag BANERJEE, Chanyuan Liu, Xinyi Chen, Eleanor Gillette
  • Patent number: 8912522
    Abstract: An apparatus, system, and method are provided for a vertical two-terminal nanotube device configured to capture and generate energy, to store electrical energy, and to integrate these functions with power management circuitry. The vertical nanotube device can include a column disposed in an anodic oxide material extending from a first distal end of the anodic oxide material to a second distal end of the anodic oxide material. Further, the vertical nanotube device can include a first material disposed within the column, a second material disposed within the column, and a third material disposed between the first material and the second material. The first material fills the first distal end of the column and extends to the second distal end of the column along inner walls of the column. The second material fills the first distal end of the column and extends to the second distal end of the column within the first material.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: December 16, 2014
    Assignee: University of Maryland
    Inventors: Gary W. Rubloff, Sang Bok Lee, Israel Perez, Laurent Lecordier, Parag Banerjee
  • Publication number: 20110073827
    Abstract: An apparatus, system, and method are provided for a vertical two-terminal nanotube device configured to capture and generate energy, to store electrical energy, and to integrate these functions with power management circuitry. The vertical nanotube device can include a column disposed in an anodic oxide material extending from a first distal end of the anodic oxide material to a second distal end of the anodic oxide material. Further, the vertical nanotube device can include a first material disposed within the column, a second material disposed within the column, and a third material disposed between the first material and the second material. The first material fills the first distal end of the column and extends to the second distal end of the column along inner walls of the column. The second material fills the first distal end of the column and extends to the second distal end of the column within the first material.
    Type: Application
    Filed: August 26, 2010
    Publication date: March 31, 2011
    Applicant: UNIVERSITY OF MARYLAND
    Inventors: Gary W. RUBLOFF, Sang Bok LEE, Israel PEREZ, Laurent LECORDIER, Parag BANERJEE
  • Patent number: D908102
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: January 19, 2021
    Assignee: Veeco Instruments Inc.
    Inventors: Michael W. Pacier, Michael J. Sershen, Adam F. Bertuch, Laurent Lecordier
  • Patent number: D908103
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: January 19, 2021
    Assignee: Veeco Instruments Inc.
    Inventors: Michael W. Pacier, Michael J. Sershen, Adam F. Bertuch, Laurent Lecordier