Patents by Inventor Laurent Viravaux

Laurent Viravaux has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230032336
    Abstract: A method for bonding a first substrate and a second substrate comprises bringing the first and second substrates into contact and implementing heating of a peripheral zone of at least one of the first and second substrates. The heating is initiated before the substrates are brought into contact and continued at least until the substrates are brought into contact in the zone. The heating is implemented by an infrared lamp configured to emit radiation having an outer boundary corresponding to the edge of the substrates.
    Type: Application
    Filed: November 24, 2020
    Publication date: February 2, 2023
    Inventors: Walter Schwarzenbach, Laurent Viravaux
  • Publication number: 20230011691
    Abstract: A method for etching a main surface of a thin layer of a substrate, which comprises immersing the substrate n an etching bath so as to expose the main surface to an etching agent, the substrate being oriented relative to the bath such that: —when it is introduced into the bath, the main surface is gradually immersed from an initial introduction point (PII) to an end introduction point (PFI), at an introduction speed, and —when it exits the bath, the main surface gradually emerges from an initial exit point (PIS) to an end exit point (PFS), at an exit speed, the method being characterized in that: —the introduction speed is chosen in such a way as to etch the main surface according to a first non-uniform profile between the initial introduction point (PII) and the end introduction point (PFI), and/or —the exit speed is chosen in such a way as to etch the main surface according to a second non-uniform profile between the initial exit point (PIS) and the end exit point (PFS), in order to compensate for non-unifo
    Type: Application
    Filed: November 27, 2020
    Publication date: January 12, 2023
    Inventors: Laurent Viravaux, Sébastien Carton, Onintza Ros
  • Publication number: 20200083065
    Abstract: A method of treating an SOI substrate in a single wafer cleaner includes gripping and rotating the substrate using a system, and dispensing a first liquid solution from a first nozzle in the form of a spray of droplets onto a front face of the SOI substrate. The kinetic energy per unit area of the droplets is lower than or equal to 30 joules/m2.
    Type: Application
    Filed: September 4, 2019
    Publication date: March 12, 2020
    Inventors: Laurent Viravaux, Sébastien Ledrappier
  • Patent number: 7163897
    Abstract: The invention provides a method of assaying at least one element in a material including silicon. The method includes the steps of decomposing a portion of the material with an etching agent to form a solution containing hexafluorosilicic acid and at least one element to be assayed, heating the solution to a temperature sufficient to transform a substantial portion of the hexafluorosilicic acid into silicon tetrafluoride and to cause at least some of the silicon tetrafluoride to evaporate, such that a solution for assaying is obtained in which the silicon content is reduced while and the elements to be assayed are conserved; and assaying at least one element contained in the solution. The invention is applicable to the field of manufacturing substrates or components for optics, electronics, or optoelectronics, and in particular to the field of quality control.
    Type: Grant
    Filed: August 6, 2003
    Date of Patent: January 16, 2007
    Assignee: S.O.I.Tec Silicon on Insulator Technologies S.A.
    Inventor: Laurent Viravaux
  • Publication number: 20040029387
    Abstract: The invention provides a method of assaying at least one element in a material including silicon. The method includes the steps of decomposing a portion of the material with an etching agent to form a solution containing hexafluorosilicic acid and at least one element to be assayed, heating the solution to a temperature sufficient to transform a substantial portion of the hexafluorosilicic acid into silicon tetrafluoride and to cause at least some of the silicon tetrafluoride to evaporate, such that a solution for assaying is obtained in which the silicon content is reduced while and the elements to be assayed are conserved; and assaying at least one element contained in the solution. The invention is applicable to the field of manufacturing substrates or components for optics, electronics, or optoelectronics, and in particular to the field of quality control.
    Type: Application
    Filed: August 6, 2003
    Publication date: February 12, 2004
    Inventor: Laurent Viravaux