Abstract: The present disclosure relates to an adaptive, free-space optical system. The system may have a controller and a digital micromirror (DMM) array responsive to the controller. The digital micromirror may include a plurality of independently controllable micromirror elements forming a receiver for receiving optical signals from an environmental scene. At least two of the plurality of independently controllable micromirror elements are steerable in different directions to receive optical signals emanating from two or more locations within the environmental scene. A beam steering subsystem forms a portion of the micromirror array and is in communication with the controller for receiving control signals from the controller. A detector is used to receive an incoming free space optical signal imaged by at least one of the micromirror elements.

Abstract: A method of post-processing an actuator element is presented. The method begins by receiving a fabricated actuator element including a metallic layer contacting a substrate, sacrificial layer proximate the metallic layer, and a first dielectric layer on the sacrificial layer. The metallic layer has an end proximal to and contacting at least part of the substrate and a distal end extending over the first dielectric layer. A second dielectric is deposited on a portion of the metallic layer at the distal end. And, the sacrificial layer is removed.

Abstract: An actuator element of a MEMS device is provided, which is fabricated using surface micromachining on a substrate. An insulating layer having a first portion contacts the substrate while a second portion is separated from the substrate by a gap. A metallic layer contacts the insulating layer having a first portion contacting the first portion of the insulating layer and a second portion contacting the second portion of the insulating layer. The second portion of the metallic layer is prestressed. Alternately, the actuator element includes a first insulating layer separated from the substrate by a gap. A metallic layer has a first portion contacting the substrate and a second portion contacting the insulating layer. A second insulating layer contacts a portion of the second portion of the metallic layer opposite the first insulating layer, where the second insulating layer is prestressed.

Abstract: An actuator element of a MEMS device is provided, which is fabricated using surface micromachining on a substrate. An insulating layer having a first portion contacts the substrate while a second portion is separated from the substrate by a gap. A metallic layer contacts the insulating layer having a first portion contacting the first portion of the insulating layer and a second portion contacting the second portion of the insulating layer. The second portion of the metallic layer is prestressed. Alternately, the actuator element includes a first insulating layer separated from the substrate by a gap. A metallic layer has a first portion contacting the substrate and a second portion contacting the insulating layer. A second insulating layer contacts a portion of the second portion of the metallic layer opposite the first insulating layer, where the second insulating layer is prestressed.

Abstract: An actuator element of a MEMS device on a substrate is provided to create large, out-of-plane deflection. The actuator element includes a metallic layer having a first portion contacting the substrate and a second portion having an end proximal to the first portion. A distal end is cantilevered over the substrate. A first insulating layer contacts the metallic layer on a bottom contacting surface of the second cantilevered portion from the proximal to the distal end. A second insulating layer contacts the metallic layer on a portion of a top contacting surface at the distal end. The second portion of the metallic layer is prestressed. A coefficient of thermal expansion of the first and second insulating layers is different than a coefficient of thermal expansion of the metallic layer. And, a Young's modulus of the first and second insulating layer is different than a Young's modulus of the metallic layer.

Abstract: The present disclosure relates to an imaging system which may make use of an electronic controller, a digital micromirror array, an aperture control system and a detector to image a desired scene. The digital micromirror array has a plurality of micromirror elements responsive to control signals generated by the electronic controller for electronically aiming the micromirror elements in a desired direction to image the desired area, and for receiving and reflecting light emanating from the desired area. The aperture control system receives light reflected from the digital micromirror array and passes a predetermined subportion of the received light therethrough. The detector is responsive to the predetermined subportion of light.

Abstract: The present disclosure relates to an adaptive, free-space optical system. The system may have a controller and a digital micromirror (DMM) array responsive to the controller. The digital micromirror may include a plurality of independently controllable micromirror elements forming a receiver for receiving optical signals from an environmental scene. At least two of the plurality of independently controllable micromirror elements are steerable in different directions to receive optical signals emanating from two or more locations within the environmental scene. A beam steering subsystem forms a portion of the micromirror array and is in communication with the controller for receiving control signals from the controller. A detector is used to receive an incoming free space optical signal imaged by at least one of the micromirror elements.

Abstract: The present disclosure relates to an imaging system which may make use of an electronic controller, a digital micromirror array, an aperture control system and a detector to image a desired scene. The digital micromirror array has a plurality of micromirror elements responsive to control signals generated by the electronic controller for electronically aiming the micromirror elements in a desired direction to image the desired area, and for receiving and reflecting light emanating from the desired area. The aperture control system receives light reflected from the digital micromirror array and passes a predetermined subportion of the received light therethrough. The detector is responsive to the predetermined subportion of light.

Abstract: A method of post-processing an actuator element is presented. The method begins by receiving a fabricated actuator element including a metallic layer contacting a substrate, sacrificial layer proximate the metallic layer, and a first dielectric layer on the sacrificial layer. The metallic layer has an end proximal to and contacting at least part of the substrate and a distal end extending over the first dielectric layer. A second dielectric is deposited on a portion of the metallic layer at the distal end. And, the sacrificial layer is removed.

Abstract: An actuator element of a MEMS device on a substrate is provided to create large, out-of-plane deflection. The actuator element includes a metallic layer having a first portion contacting the substrate and a second portion having an end proximal to the first portion. A distal end is cantilevered over the substrate. A first insulating layer contacts the metallic layer on a bottom contacting surface of the second cantilevered portion from the proximal to the distal end. A second insulating layer contacts the metallic layer on a portion of a top contacting surface at the distal end. The second portion of the metallic layer is prestressed. A coefficient of thermal expansion of the first and second insulating layers is different than a coefficient of thermal expansion of the metallic layer. And, a Young's modulus of the first and second insulating layer is different than a Young's modulus of the metallic layer.

Abstract: A cooling structure for a heat source, where the cooling structure includes a beam having a first end and a second end and a length disposed therebetween. The beam is formed at least in part of a first material having a first thermal coefficient of expansion and a second material having a second thermal coefficient of expansion, where the first thermal coefficient of expansion is different from the second thermal coefficient of expansion. The first end of the beam is thermally connected to the heat source, such that heat generated by the heat source is conducted along the length of the beam to the second end of the beam. The heat conducted through the beam causes the beam to deflect as the first and second materials expand differently due to the difference in the first and second thermal coefficients of expansion.

Abstract: An actuator element of a MEMS device is provided, which is fabricated using surface micromachining on a substrate. An insulating layer having a first portion contacts the substrate while a second portion is separated from the substrate by a gap. A metallic layer contacts the insulating layer having a first portion contacting the first portion of the insulating layer and a second portion contacting the second portion of the insulating layer. The second portion of the metallic layer is prestressed. Alternately, the actuator element includes a first insulating layer separated from the substrate by a gap. A metallic layer has a first portion contacting the substrate and a second portion contacting the insulating layer. A second insulating layer contacts a portion of the second portion of the metallic layer opposite the first insulating layer, where the second insulating layer is prestressed.